Silicon micromachined RF MEMS resonators
Authors:
- F.J. SchmuckleFSF.J. Schmuckle
- B. SchauweckerBSB. Schauwecker
- J.-F. LuyJLJ.-F. Luy
- W. HeinrichWHW. Heinrich
- 25 June 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2 (0149645X) , 1209-1212
Abstract
A new resonator concept based on a three dimensional (3D) high resistivity silicon substrate filled cavity resonators is investigated. Fabrication is done using micromachining technologies. Two types of resonators are investigated, an "open-end" patch resonator and a "short circuit via" resonator. Both types show good agreement in simulated and measured resonance frequencies (within 2%). However, measured quality factors (50-70) are still lower than the simulated values and theoretical expectations.Keywords
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