Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
Authors:
- 2 May 2011
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 39 (11) , 2536-2537
Abstract
Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics.Keywords
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