Molecular dynamics simulations with electronic stopping can reproduce experimental sputtering yields of metals impacted by large cluster ions
Authors:
- Jiting TianJTJiting Tian
- Wei ZhouWZWei Zhou
- Qijie FengQFQijie Feng
- Jian ZhengJZJian Zheng
- 1 March 2018
- journal article
- research article
- Published by Elsevier in Applied Surface Science
- Vol. 435, 65-71
Abstract
No abstract availableKeywords
Funding Information
- NPL
- CAEP (2015AB01)
This publication has 44 references indexed in Scilit:
- Molecular dynamics simulations of cluster impacts on solid targets: implantation, surface modification, and sputteringJournal of Computational Electronics, 2013
- Computational view of surface based organic mass spectrometryMass Spectrometry Reviews, 2008
- Dynamics of cluster induced sputtering in goldNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2007
- TOF-SIMS Analysis Using C60. Effect of Impact Energy on Yield and DamageAnalytical Chemistry, 2006
- The Magic of Cluster SIMSAnalytical Chemistry, 2005
- Nano-processing with gas cluster ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000
- Molecule Liftoff from SurfacesAccounts of Chemical Research, 2000
- Molecular dynamics investigations of surface damage produced by kiloelectronvolt self-bombardment of solidsPhilosophical Magazine A, 1999
- Molecular-dynamics simulation of sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Surface modification with gas cluster ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993