Microstructural evolution of a-Si:H prepared using hydrogen dilution of silane studied by real time spectroellipsometry
Authors:
- Joohyun KohJKJoohyun Koh
- H FujiwaraHFH Fujiwara
- R.W CollinsRCR.W Collins
- Yeeheng LeeYLYeeheng Lee
- C.R WronskiCWC.R Wronski
- 1 May 1998
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 227-230, 73-77
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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