Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates
Authors:
- Jordi SamàJSJordi Samà
- Michael S. SeifnerMSMichael S. Seifner
- Guillem Domènech-GilGDGuillem Domènech-Gil
- Joaquín SantanderJSJoaquín Santander
- Carlos CalazaCCCarlos Calaza
- Mauricio MorenoMMMauricio Moreno
- Isabel GràciaIGIsabel Gràcia
- Sven BarthSBSven Barth
- Albert Romano-RodríguezARAlbert Romano-Rodríguez
- 1 May 2017
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 243, 669-677
Abstract
No abstract availableFunding Information
- Ministerio de Ciencia e Innovación (NGG118, NGG199)
- Technische Universitat Wien
- Ministerio de Economía y Competitividad (TEC2013-48147-C6)
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