Pressure sensor based on flexible photonic crystal membrane

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Abstract
We demonstrate a pressure sensor based on deformation of a periodically nanostructured Bragg grating waveguide on a flexible 50 µm polydimethylsiloxane membrane and remote optical read out. A pressure change causes deformation of this 2 mm diameter photonic crystal membrane sealing a reference volume. The resulting shift of the guided mode resonances is observed by a remote camera as localized color change. Crossed polarization filters are employed for enhancing the visibility of the guided mode resonances. Pressure values are calculated from the intensity change in the green color channel using a calibration curve in the range of 2000 Pa to 4000 Pa. A limit of detection (LOD) of 160 Pa is estimated. This LOD combined with the small size of the sensor and its biocompatibility render it promising for application as an implantable intraocular pressure sensor.

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