Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime
Authors:
- Patrick P NaulleauPNPatrick P Naulleau
- 1 December 2001
- journal article
- research article
- Published by Elsevier in Optics Communications
- Vol. 200 (1-6) , 27-34
Abstract
No abstract availableKeywords
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