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Publications
Film Thickness Profiles over Topography in Spin Coating
Home
Publications
Film Thickness Profiles over Topography in Spin Coating
Film Thickness Profiles over Topography in Spin Coating
Authors:
LP
L. M. Peurrung
L. M. Peurrung
DG
D. B. Graves
D. B. Graves
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1 July 1991
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 138
(7)
,
2115-2124
DOI:
10.1149/1.2085935
Abstract
No abstract available
Cited
Cited by 64 articles
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