Effect of Sputtering Pressure on Surface Roughness, Oxygen Vacancy and Electrical Properties of a-IGZO Thin Films
Authors:
- Li LingLLLi Ling
- Xue TaoXTXue Tao
- Song ZhongxiaoSZSong Zhongxiao
- Liu ChunliangLCLiu Chunliang
- Ma FeiMFMa Fei
- 1 August 2016
- journal article
- Published by Elsevier in Rare Metal Materials and Engineering
- Vol. 45 (8) , 1992-1996
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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