Hot-Pressing Deformation Yields Fine-Grained, Highly Dense and (002) Textured Ru Targets

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Abstract
Ruthenium (Ru) is a refractory metal that has applications in the semiconductor industry as a sputtering target material. However, conventional powder metallurgy methods cannot produce dense and fine-grained Ru targets with preferred orientation. Here, we present a novel method of hot-pressing deformation to fabricate Ru targets with high relative density (98.8%), small grain size (~4.4 μm) and strong (002) texture. We demonstrate that applying pressures of 30–40 MPa at 1400 °C transforms cylindrical Ru samples into disk-shaped targets with nearly full densification in the central region. We also show that the hardness and the (002)/(101) peak intensity ratio of the targets increase with the pressure, indicating enhanced mechanical and crystallographic properties. Our study reveals the mechanisms of densification and texture formation of Ru targets by hot-pressing deformation.
Funding Information
  • National Natural Science Foundation of China (51977027, 51967008, 202102AB080008, N2002007, N182508026, YPML-2023050250, SKL-SPM-202014, SKL-SPM-202015)
  • Yunnan Key Research and Development Program (51977027, 51967008, 202102AB080008, N2002007, N182508026, YPML-2023050250, SKL-SPM-202014, SKL-SPM-202015)
  • Fundamental Research Funds for the Central Universities (51977027, 51967008, 202102AB080008, N2002007, N182508026, YPML-2023050250, SKL-SPM-202014, SKL-SPM-202015)
  • Open Project of Yunnan Precious Metals Laboratory Co., Ltd. (51977027, 51967008, 202102AB080008, N2002007, N182508026, YPML-2023050250, SKL-SPM-202014, SKL-SPM-202015)
  • State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals (51977027, 51967008, 202102AB080008, N2002007, N182508026, YPML-2023050250, SKL-SPM-202014, SKL-SPM-202015)

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