Multiscale Imaging and Tip-Scratch Studies Reveal Insight into the Plasma Oxidation of Graphite

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Abstract
The plasma oxidation process of highly oriented pyrolytic graphite (HOPG) has been investigated through a combination of multiscale (micrometric to atomic) imaging by atomic force and scanning tunneling microscopies (AFM/STM) and STM tip-scratching of the HOPG substrate. Complementary information was obtained by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Repetitive imaging of the same HOPG location following a series of consecutive plasma treatments allowed an accurate determination of the plasma etch rates along both the a and c crystallographic directions of the graphite lattice. The etch rates were typically in the range of a few nm per min along the a axis, and the equivalent of 1-6 graphene layers per min along the c axis. The results pointed to the existence of two main plasma etching regimes, related to short ( or =30 min) treatment times. This was inferred not only from the measured plasma etch rates but also from the observation of fundamental differences in the atomic-scale surface structure of the plasma-treated HOPG samples, and from the general mechanical behavior of the materials under the action of the AFM tip. In particular, atomic-scale STM imaging suggested a change from a defected, but essentially graphitic, surface in the first regime to an amorphous carbon surface in the second regime. Together with AFM and STM, Raman spectroscopy and XPS provided a consistent picture of the surface structure and chemistry of the plasma-modified HOPG in the two regimes. The implications of these results as well as the possible mechanism that drives the plasma etching process in the two regimes are discussed.

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