A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM
Authors:
- Mohammad TahmasebipourMTMohammad Tahmasebipour
- Ali VafaieAVAli Vafaie
- 1 July 2020
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 309
Abstract
No abstract availableKeywords
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