Titanium nitride coatings by sputter ion plating
Authors:
- J.P CoadJCJ.P Coad
- P WarringtonPWP Warrington
- R.B NewberyRNR.B Newbery
- M.H JacobsMJM.H Jacobs
- 30 September 1985
- journal article
- Published by Elsevier in Materials & Design (1980-2015)
- Vol. 6 (4) , 190-195
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- D.C. glow discharge techniques for surface treatment and coatingThin Solid Films, 1977
- Incorporation of rare gases in sputtered amorphous metal filmsJournal of Vacuum Science and Technology, 1977
- The timing of student examinationsAcademic Medicine, 1975
- Lattice parameter of the non-stoichiometric compound TiNxJournal of Applied Crystallography, 1975
- Fundamentals of Ion PlatingJournal of Vacuum Science and Technology, 1973
- Gas Incorporation into Sputtered FilmsJournal of Applied Physics, 1967