Simultaneous Determination of Carrier Concentration, Mobility, and Thickness of SiC Homoepilayers by Infrared Reflectance Spectroscopy
Authors:
- Shingo OishiSOShingo Oishi
- Yasuto HijikataYasuto Hijikata
- Hiroyuki YaguchiHYHiroyuki Yaguchi
- Sadafumi YoshidaSYSadafumi Yoshida
- 17 November 2006
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 45 (12L) , L1226
Abstract
No abstract availableKeywords
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