Toward a novel planar circuit compatible silicon micromachined waveguide
Authors:
- L.P.B. KatehiLKL.P.B. Katehi
- 20 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 221-224
Abstract
A novel, completely packaged planar-fed silicon micromachined waveguide/resonator is proposed. Simulated results for a Ka-band resonator are given, along with initial results of the required three-dimensional photolithographic patterning along sloping sidewalls.Keywords
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