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  3. Silicon Oxide Etching Process of NF3 and F3NO Plasmas with a Residual Gas Analyzer
  4. Publication with shared reference
  5. 10.3390/ma14113026
  1. Home
  2. Publications
  3. Silicon Oxide Etching Process of NF3 and F3NO Plasmas with a Residual Gas Analyzer
  4. Publication with shared reference
  5. 10.3390/ma14113026

Publications with shared reference:

Silicon Oxide Etching Process of NF3 and F3NO Plasmas with a Residual Gas Analyzer

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