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Publications
Impact of in situ NH3 pre-treatment of LPCVD SiN passivation on GaN HEMT performance
Publication with shared reference
10.1088/1361-6641/ac4b17
Home
Publications
Impact of in situ NH3 pre-treatment of LPCVD SiN passivation on GaN HEMT performance
Publication with shared reference
10.1088/1361-6641/ac4b17
Publications with shared reference:
Impact of
in situ
NH
3
pre-treatment of LPCVD SiN passivation on GaN HEMT performance
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