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  3. 3D HfO2 Thin Film MEMS Capacitor with Superior Energy Storage Properties
  4. Publication with shared reference
  5. 10.1002/adfm.202305733
  1. Home
  2. Publications
  3. 3D HfO2 Thin Film MEMS Capacitor with Superior Energy Storage Properties
  4. Publication with shared reference
  5. 10.1002/adfm.202305733

Publications with shared reference:

3D HfO2 Thin Film MEMS Capacitor with Superior Energy Storage Properties

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