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Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS)
Publication with shared reference
10.1364/oe.536578
Home
Publications
Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS)
Publication with shared reference
10.1364/oe.536578
Publications with shared reference:
Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS)
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