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Publications
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
Publication with shared reference
10.3390/mi15121421
Home
Publications
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
Publication with shared reference
10.3390/mi15121421
Publications with shared reference:
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
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