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The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
Publication with shared reference
10.1140/epjb/e2009-00131-6
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Publications
The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
Publication with shared reference
10.1140/epjb/e2009-00131-6
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The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
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