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A Comparison of Defect States in Tantalum Pentoxide (Ta2O5) Films after Rapid Thermal Annealing in O2 or N2O by Zero-Bias Thermally Stimulated Current Spectroscopy
Publication with shared reference
10.1143/jjap.35.2599
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Publications
A Comparison of Defect States in Tantalum Pentoxide (Ta2O5) Films after Rapid Thermal Annealing in O2 or N2O by Zero-Bias Thermally Stimulated Current Spectroscopy
Publication with shared reference
10.1143/jjap.35.2599
Publications with shared reference:
A Comparison of Defect States in Tantalum Pentoxide (Ta
2
O
5
) Films after Rapid Thermal Annealing in O
2
or N
2
O by Zero-Bias Thermally Stimulated Current Spectroscopy
0
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