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  3. Junctions for Deep Sub-100 NM MOS: How Far will Ion Implantation Take Us?
  4. Publication with shared reference
  5. 10.1557/proc-610-b1.2
  1. Home
  2. Publications
  3. Junctions for Deep Sub-100 NM MOS: How Far will Ion Implantation Take Us?
  4. Publication with shared reference
  5. 10.1557/proc-610-b1.2

Publications with shared reference:

Junctions for Deep Sub-100 NM MOS: How Far will Ion Implantation Take Us?

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