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  3. 6 nm half-pitch lines and 0.04 µm2static random access memory patterns by nanoimprint lithography
  4. Publication with shared reference
  5. 10.1088/0957-4484/16/8/010
  1. Home
  2. Publications
  3. 6 nm half-pitch lines and 0.04 µm2static random access memory patterns by nanoimprint lithography
  4. Publication with shared reference
  5. 10.1088/0957-4484/16/8/010

Publications with shared reference:

6 nm half-pitch lines and 0.04 µm2static random access memory patterns by nanoimprint lithography

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