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  3. Controlled Growth of TaN, Ta3N5, and TaOxNy Thin Films by Atomic Layer Deposition
  4. Publication with shared reference
  5. 10.1021/cm980760x
  1. Home
  2. Publications
  3. Controlled Growth of TaN, Ta3N5, and TaOxNy Thin Films by Atomic Layer Deposition
  4. Publication with shared reference
  5. 10.1021/cm980760x

Publications with shared reference:

Controlled Growth of TaN, Ta3N5, and TaOxNy Thin Films by Atomic Layer Deposition

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