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Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge
Publication with shared reference
10.1103/physreve.51.6063
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Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge
Publication with shared reference
10.1103/physreve.51.6063
Publications with shared reference:
Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge
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