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  3. Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study
  4. Publication with shared reference
  5. 10.1016/j.surfcoat.2005.11.076
  1. Home
  2. Publications
  3. Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study
  4. Publication with shared reference
  5. 10.1016/j.surfcoat.2005.11.076

Publications with shared reference:

Selective effect of ion/surface interaction in low frequency PACVD of SIC:H films: Part B. Microstructural study

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