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  3. Influence of substrate bias on the structure and properties of (Ti, Al)N films deposited by filtered cathodic vacuum arc
  4. Publication with shared reference
  5. 10.1116/1.1368840
  1. Home
  2. Publications
  3. Influence of substrate bias on the structure and properties of (Ti, Al)N films deposited by filtered cathodic vacuum arc
  4. Publication with shared reference
  5. 10.1116/1.1368840

Publications with shared reference:

Influence of substrate bias on the structure and properties of (Ti, Al)N films deposited by filtered cathodic vacuum arc

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