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The influence of CH4/H2/Ar plasma etching on the conductivity of n-type gallium nitride
Publication with shared reference
10.1063/1.360555
Home
Publications
The influence of CH4/H2/Ar plasma etching on the conductivity of n-type gallium nitride
Publication with shared reference
10.1063/1.360555
Publications with shared reference:
The influence of CH4/H2/Ar plasma etching on the conductivity of
n
-type gallium nitride
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