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Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
Publication with shared reference
10.1063/1.1770900
Home
Publications
Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
Publication with shared reference
10.1063/1.1770900
Publications with shared reference:
Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach
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