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Fabrication of SiGe/Si/Cr bent cantilevers based on self-rolling of epitaxial films
Publication with shared reference
10.1016/s0167-9317(03)00119-9
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Fabrication of SiGe/Si/Cr bent cantilevers based on self-rolling of epitaxial films
Publication with shared reference
10.1016/s0167-9317(03)00119-9
Publications with shared reference:
Fabrication of SiGe/Si/Cr bent cantilevers based on self-rolling of epitaxial films
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