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  3. Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes
  4. Publication with shared reference
  5. 10.1063/1.4941537
  1. Home
  2. Publications
  3. Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes
  4. Publication with shared reference
  5. 10.1063/1.4941537

Publications with shared reference:

Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes

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