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  3. Formation of interfacial layer during reactive sputtering of hafnium oxide
  4. Publication with shared reference
  5. 10.1063/1.1574594
  1. Home
  2. Publications
  3. Formation of interfacial layer during reactive sputtering of hafnium oxide
  4. Publication with shared reference
  5. 10.1063/1.1574594

Publications with shared reference:

Formation of interfacial layer during reactive sputtering of hafnium oxide

0 publications found

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