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  3. IMPLANTATION PROFILES FOR 40-keV PHOSPHORUS IONS IN SILICON SINGLE-CRYSTAL SUBSTRATES
  4. Publication with shared reference
  5. 10.1063/1.1754475
  1. Home
  2. Publications
  3. IMPLANTATION PROFILES FOR 40-keV PHOSPHORUS IONS IN SILICON SINGLE-CRYSTAL SUBSTRATES
  4. Publication with shared reference
  5. 10.1063/1.1754475

Publications with shared reference:

IMPLANTATION PROFILES FOR 40-keV PHOSPHORUS IONS IN SILICON SINGLE-CRYSTAL SUBSTRATES

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