Xiao Liu
Current Organizations / Institutes
The organizations/institutes from the scholar's latest article
Previous Organizations / Institutes
The organizations / institutes from the scholar's other articles in the past ten years
Research Subjects
Xiao Liu has a total of 125 co-authors. Here are the top co-authors by number of shared publications:
- Thomas Harker Metcalf
US Naval Research Laboratory
18 shared publications - Matthew Robert Abernathy
Naval Research Laboratory, Washington, DC 20375, USA
8 shared publications - Battogtokh Jugdersuren
Jacobs Engineering Group, Hanover, USA
7 shared publications - Frances Hellman
University of California
5 shared publications - Manel Molina-Ruiz
University of California
5 shared publications H. C. Jacks
Physics Department, University of California, Berkeley, California 94720, USA
3 shared publications
Latest Publications
- 24 August 2026
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 10 (8) , 085602
Internal friction measurements of ion beam sputtered amorphous silica
The ability to minimize low-temperature acoustic loss in amorphous materials would have implications in fields as wide-ranging as gravitational wave detection and quantum computing. In this paper, we measure the internal friction between $300\phantom{\rule{0.16em}{0ex}}\mathrm{mK}$ and room temperature of several thin silica films deposited by ion beam sputtering onto ultra-high-$Q$ silicon resonators. The measurements reveal internal configurations of as-deposited films that are markedly different from that of bulk silica. Over a broad temperature range, the films' internal frictions differ from one another by a factor of two; by contrast, a review shows that sub-MHz internal friction measurements of bulk silica fall within a 35% band with a pronounced main absorption peak between $20\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ and $40\phantom{\rule{0.16em}{0ex}}\mathrm{K}$. This peak is absent in the films presented here, except for one film that had been annealed at $900\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$. Annealing at $500\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$ erased the thermal histories of the other thin films to create internal friction values that are consistent from film-to-film but yet still markedly different from those of the bulk below $100\phantom{\rule{0.16em}{0ex}}\mathrm{K}$, while creating the steep bulk-like drop-off above $100\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ that the as-deposited films lacked. In the context of theoretical structural modeling, our results suggest that exposure to temperatures of at least $900\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$ is needed to form the network of tetrahedra considered characteristic of amorphous silica. The present measurements, especially when compared alongside previous work, appear to show that these structures are suppressed in many thin film preparations. These measurements also show, for as-deposited films, an excess of excitations in the 0.15--$0.3\phantom{\rule{0.16em}{0ex}}\mathrm{eV}$ range which can be annealed away to bring about the ${Q}^{\ensuremath{-}1}$ drop-off above the main absorption peak. The shear moduli of all the films are qualitatively similar to bulk silica, with a positive temperature coefficient above a minimum near $60\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ and a negative temperature coefficient below.- 24 August 2026
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 10 (8) , 085602
Internal friction measurements of ion beam sputtered amorphous silica
The ability to minimize low-temperature acoustic loss in amorphous materials would have implications in fields as wide-ranging as gravitational wave detection and quantum computing. In this paper, we measure the internal friction between $300\phantom{\rule{0.16em}{0ex}}\mathrm{mK}$ and room temperature of several thin silica films deposited by ion beam sputtering onto ultra-high-$Q$ silicon resonators. The measurements reveal internal configurations of as-deposited films that are markedly different from that of bulk silica. Over a broad temperature range, the films' internal frictions differ from one another by a factor of two; by contrast, a review shows that sub-MHz internal friction measurements of bulk silica fall within a 35% band with a pronounced main absorption peak between $20\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ and $40\phantom{\rule{0.16em}{0ex}}\mathrm{K}$. This peak is absent in the films presented here, except for one film that had been annealed at $900\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$. Annealing at $500\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$ erased the thermal histories of the other thin films to create internal friction values that are consistent from film-to-film but yet still markedly different from those of the bulk below $100\phantom{\rule{0.16em}{0ex}}\mathrm{K}$, while creating the steep bulk-like drop-off above $100\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ that the as-deposited films lacked. In the context of theoretical structural modeling, our results suggest that exposure to temperatures of at least $900\phantom{\rule{0.16em}{0ex}}{}^{\ensuremath{\circ}}\mathrm{C}$ is needed to form the network of tetrahedra considered characteristic of amorphous silica. The present measurements, especially when compared alongside previous work, appear to show that these structures are suppressed in many thin film preparations. These measurements also show, for as-deposited films, an excess of excitations in the 0.15--$0.3\phantom{\rule{0.16em}{0ex}}\mathrm{eV}$ range which can be annealed away to bring about the ${Q}^{\ensuremath{-}1}$ drop-off above the main absorption peak. The shear moduli of all the films are qualitatively similar to bulk silica, with a positive temperature coefficient above a minimum near $60\phantom{\rule{0.16em}{0ex}}\mathrm{K}$ and a negative temperature coefficient below.- 5 December 2025
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 9 (12)
Acoustic measurements of two-level systems in the ultrastable organic glass 2TNATA
- 5 December 2025
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 9 (12)
Acoustic measurements of two-level systems in the ultrastable organic glass 2TNATA
- 11 February 2025
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 43 (2)
Effect of organic solvent treatments on oCVD-deposited PEDOT thin films
Thiophene-based polymers, notably poly(3,4-ethylenedioxythiophene) (PEDOT) and its composite with poly(styrenesulfonate) (PEDOT:PSS), are attractive targets for thermoelectric research because of their high ZT values and ease of thin-film synthesis, but traditional solution-phase routes limit both chemical control and applicable form factors. Oxidative chemical vapor deposition (oCVD) is an alternative technique capable of producing highly conductive PEDOT films without the use of PSS, yet the thermoelectric properties of PEDOT produced through oCVD have not been as thoroughly investigated. Here, we report an enhancement in thermoelectric properties of oCVD-grown PEDOT films with V2O5 inclusions through treatment in polar aprotic, high-dielectric organic solvents (DMSO, EG, and DMF). In solution-phase deposited films, the performance enhancements from post-deposition treatments in such solvents are often attributed to depletion or segregation of the insulating PSS phase, but the similar enhancements in our PSS-free films show that other effects on the physicochemical nature of the PEDOT must also be present. Our observations provide key insights into routes to optimize vapor-phase deposited PEDOT as well as the potentially misunderstood effects of organic solvents on PEDOT in general.
- 11 February 2025
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 43 (2)
Effect of organic solvent treatments on oCVD-deposited PEDOT thin films
Thiophene-based polymers, notably poly(3,4-ethylenedioxythiophene) (PEDOT) and its composite with poly(styrenesulfonate) (PEDOT:PSS), are attractive targets for thermoelectric research because of their high ZT values and ease of thin-film synthesis, but traditional solution-phase routes limit both chemical control and applicable form factors. Oxidative chemical vapor deposition (oCVD) is an alternative technique capable of producing highly conductive PEDOT films without the use of PSS, yet the thermoelectric properties of PEDOT produced through oCVD have not been as thoroughly investigated. Here, we report an enhancement in thermoelectric properties of oCVD-grown PEDOT films with V2O5 inclusions through treatment in polar aprotic, high-dielectric organic solvents (DMSO, EG, and DMF). In solution-phase deposited films, the performance enhancements from post-deposition treatments in such solvents are often attributed to depletion or segregation of the insulating PSS phase, but the similar enhancements in our PSS-free films show that other effects on the physicochemical nature of the PEDOT must also be present. Our observations provide key insights into routes to optimize vapor-phase deposited PEDOT as well as the potentially misunderstood effects of organic solvents on PEDOT in general.
- 6 March 2024
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 8 (3) , 035603
Low mechanical loss and high refractive index in amorphous films grown by magnetron sputteringThe ability to observe astronomical events through the detection of gravitational waves relies on the quality of multilayer coatings used on the optical mirrors of interferometers. Amorphous (including ) currently limits detector sensitivity due to high mechanical loss. In this paper, mechanical loss measured at both cryogenic and room temperatures of amorphous films grown by magnetron sputtering and annealed in air at 500 is shown to decrease for elevated growth temperature. Films grown at 310 and annealed yield a mechanical loss of at room temperature, the lowest value reported for pure amorphous grown by magnetron sputtering to date, and comparable to the lowest values obtained for films grown by ion beam sputtering. Additionally, the refractive index increases 6% for elevated growth temperature, which could lead to improved sensitivity of gravitational-wave detectors by allowing a thickness reduction in the mirrors' coatings. Structural characterization suggests that the observed mechanical loss reduction in amorphous films with increasing growth temperature correlates with a reduction in the coordination number between oxygen and tantalum atoms, consistent with polyhedra with increased corner-sharing and reduced edge- and face-sharing structures.- 6 March 2024
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 8 (3) , 035603
Low mechanical loss and high refractive index in amorphous films grown by magnetron sputteringThe ability to observe astronomical events through the detection of gravitational waves relies on the quality of multilayer coatings used on the optical mirrors of interferometers. Amorphous (including ) currently limits detector sensitivity due to high mechanical loss. In this paper, mechanical loss measured at both cryogenic and room temperatures of amorphous films grown by magnetron sputtering and annealed in air at 500 is shown to decrease for elevated growth temperature. Films grown at 310 and annealed yield a mechanical loss of at room temperature, the lowest value reported for pure amorphous grown by magnetron sputtering to date, and comparable to the lowest values obtained for films grown by ion beam sputtering. Additionally, the refractive index increases 6% for elevated growth temperature, which could lead to improved sensitivity of gravitational-wave detectors by allowing a thickness reduction in the mirrors' coatings. Structural characterization suggests that the observed mechanical loss reduction in amorphous films with increasing growth temperature correlates with a reduction in the coordination number between oxygen and tantalum atoms, consistent with polyhedra with increased corner-sharing and reduced edge- and face-sharing structures.- Open Access
- 19 February 2024
- Published by Royal Society of Chemistry (RSC) in RSC Applied Interfaces
- Vol. 1 (3) , 531-543
Non-line-of-sight synthesis and characterization of a conformal submicron-thick cationic polymer deposited on 2D and 3D substrates
The non-line-of-sight nature of initiated chemical vapor deposition (iCVD) makes it an amenable technique for depositing thin, conformal polymer films on three-dimensional (3D) high surface-area substrates. Adding to the versatility of iCVD, we process the deposited film in situ to impart additional functionality. Herein we describe fabricating submicron-thick positively charged polymer films with labile anions, a class of materials that brings ion-transport regulation to water desalination, gas separations, and energy-storage systems. Coatings of iCVD-deposited poly(4-dimethylaminomethylstyrene) (pDMAMS) on planar and 3D substrates are reacted with an alkylating/cross-linking reagent to yield quaternary ammonium-containing pDMAMS+. By optimizing deposition conditions, we demonstrate conformal coatings of pDMAMS and pDMAMS+ spanning a thickness range of 30–1000+ nm. Chemical and mechanical characterization confirms the successful quaternization of the iCVD-generated films, subsequent ion exchange of various counterions (Br−, HCO3 −, and OH−), and enhanced modulus of the crosslinked pDMAMS+ polymer. The use of grazing-incidence X-ray scattering reveals the films are noncrystalline and contain ion clusters with anion-dependent geometry. By understanding the impact of deposition conditions and functionalization on subsequent physicochemical-mechanical properties, we lay the groundwork for using iCVD-derived pDMAMS+ films in targeted applications.
- 19 February 2024
- Published by Royal Society of Chemistry (RSC) in RSC Applied Interfaces
- Vol. 1 (3) , 531-543
Open AccessNon-line-of-sight synthesis and characterization of a conformal submicron-thick cationic polymer deposited on 2D and 3D substrates
The non-line-of-sight nature of initiated chemical vapor deposition (iCVD) makes it an amenable technique for depositing thin, conformal polymer films on three-dimensional (3D) high surface-area substrates. Adding to the versatility of iCVD, we process the deposited film in situ to impart additional functionality. Herein we describe fabricating submicron-thick positively charged polymer films with labile anions, a class of materials that brings ion-transport regulation to water desalination, gas separations, and energy-storage systems. Coatings of iCVD-deposited poly(4-dimethylaminomethylstyrene) (pDMAMS) on planar and 3D substrates are reacted with an alkylating/cross-linking reagent to yield quaternary ammonium-containing pDMAMS+. By optimizing deposition conditions, we demonstrate conformal coatings of pDMAMS and pDMAMS+ spanning a thickness range of 30–1000+ nm. Chemical and mechanical characterization confirms the successful quaternization of the iCVD-generated films, subsequent ion exchange of various counterions (Br−, HCO3 −, and OH−), and enhanced modulus of the crosslinked pDMAMS+ polymer. The use of grazing-incidence X-ray scattering reveals the films are noncrystalline and contain ion clusters with anion-dependent geometry. By understanding the impact of deposition conditions and functionalization on subsequent physicochemical-mechanical properties, we lay the groundwork for using iCVD-derived pDMAMS+ films in targeted applications.
- 21 December 2023
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 131 (25) , 256902
Hydrogen-Induced Ultralow Optical Absorption and Mechanical Loss in Amorphous Silicon for Gravitational-Wave Detectors
The sensitivity of gravitational-wave detectors is limited by the mechanical loss associated with the amorphous coatings of the detectors’ mirrors. Amorphous silicon has higher refraction index and lower mechanical loss than current high-index coatings, but its optical absorption at the wavelength used for the detectors is at present large. The addition of hydrogen to the amorphous silicon network reduces both optical absorption and mechanical loss for films prepared under a range of conditions at all measured wavelengths and temperatures, with a particularly large effect on films grown at room temperature. The uptake of hydrogen is greatest in the films grown at room temperature, but still below 1.5 at.% H, which show an ultralow optical absorption (below 10 ppm) measured at 2000 nm for 500-nm-thick films. These results show that hydrogenation is a promising strategy to reduce both optical absorption and mechanical loss in amorphous silicon, and may enable fabrication of mirror coatings for gravitational-wave detectors with improved sensitivity.
- 21 December 2023
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 131 (25) , 256902
Hydrogen-Induced Ultralow Optical Absorption and Mechanical Loss in Amorphous Silicon for Gravitational-Wave Detectors
The sensitivity of gravitational-wave detectors is limited by the mechanical loss associated with the amorphous coatings of the detectors’ mirrors. Amorphous silicon has higher refraction index and lower mechanical loss than current high-index coatings, but its optical absorption at the wavelength used for the detectors is at present large. The addition of hydrogen to the amorphous silicon network reduces both optical absorption and mechanical loss for films prepared under a range of conditions at all measured wavelengths and temperatures, with a particularly large effect on films grown at room temperature. The uptake of hydrogen is greatest in the films grown at room temperature, but still below 1.5 at.% H, which show an ultralow optical absorption (below 10 ppm) measured at 2000 nm for 500-nm-thick films. These results show that hydrogenation is a promising strategy to reduce both optical absorption and mechanical loss in amorphous silicon, and may enable fabrication of mirror coatings for gravitational-wave detectors with improved sensitivity.
- Open Access
- 4 December 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 134 (21)
Hydrogenated silicene grown by plasma enhanced chemical-vapor deposition
Silicene, a 2D hexagonal structure of silicon, has shown great promise for next-generation advanced electronic devices due to recent progress. However, one major obstacle to its application and integration into devices is its strong tendency of rapid oxidation in an ambient environment. Enhancing the chemical inertness by means of chemical modification without comprising its unique structure and properties is vital. Here, we report the fabrication of hydrogenated silicene grown on polycrystalline Ag films by means of plasma-enhanced chemical-vapor deposition (PECVD) with proper hydrogen dilution. Our Raman spectroscopy and x-ray diffraction results show the existence of typical monolayer and few-layer silicene. The x-ray photoelectron spectroscopy demonstrates its oxidation resistance after a few minutes of air exposure in a class 100 clean room. We propose that PECVD silicene can be an alternative to molecular-beam-epitaxy silicene for potential low-cost and large-area silicene applications.
- 4 December 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 134 (21)
Open AccessHydrogenated silicene grown by plasma enhanced chemical-vapor deposition
Silicene, a 2D hexagonal structure of silicon, has shown great promise for next-generation advanced electronic devices due to recent progress. However, one major obstacle to its application and integration into devices is its strong tendency of rapid oxidation in an ambient environment. Enhancing the chemical inertness by means of chemical modification without comprising its unique structure and properties is vital. Here, we report the fabrication of hydrogenated silicene grown on polycrystalline Ag films by means of plasma-enhanced chemical-vapor deposition (PECVD) with proper hydrogen dilution. Our Raman spectroscopy and x-ray diffraction results show the existence of typical monolayer and few-layer silicene. The x-ray photoelectron spectroscopy demonstrates its oxidation resistance after a few minutes of air exposure in a class 100 clean room. We propose that PECVD silicene can be an alternative to molecular-beam-epitaxy silicene for potential low-cost and large-area silicene applications.
- 19 September 2022
- Published by Springer Nature in MRS Advances
- Vol. 7 (31) , 853-857
Thermoelectric properties of nanocrystalline silicon film grown by PECVD
- 19 September 2022
- Published by Springer Nature in MRS Advances
- Vol. 7 (31) , 853-857
Thermoelectric properties of nanocrystalline silicon film grown by PECVD
- 25 April 2022
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 6 (4) , 045604
Structural tunability and origin of two-level systems in amorphous silicon
Amorphous silicon films prepared by electron-beam evaporation have systematically and substantially greater atomic density for higher thickness, higher growth temperature, and slower deposition rate, reaching the density of crystalline Si when films of thickness greater than 300 nm are grown at 425 C and at 1 Å/s. A combination of spectroscopic techniques provide insight into atomic disorder, local strains, dangling bonds, and nanovoids. Electron diffraction shows that the short-range order of the amorphous silicon is similar at all growth temperatures, but fluctuation electron microscopy shows that films grown above room temperature show a form of medium-range order not previously observed in amorphous silicon. Atomic disorder and local strain obtained from Raman spectroscopy are reduced with increasing growth temperature and show a nonmonotonic dependence on thickness. Dangling bond density decreases with increasing growth temperature and is only mildly dependent on thickness. Positron annihilation Doppler broadening spectroscopy and electron energy loss spectroscopy show that nanovoids, and not density variations within the network, are responsible for reduced atomic density. Specific heat and mechanical loss measurements, which quantify the density of tunneling two-level systems, in combination with the structural data, suggest that two-level systems in amorphous silicon films are associated with nanovoids and their surroundings, which are in essence loosely bonded regions where atoms are less constrained.- 25 April 2022
- Published by American Physical Society (APS) in Physical Review Materials
- Vol. 6 (4) , 045604
Structural tunability and origin of two-level systems in amorphous silicon
Amorphous silicon films prepared by electron-beam evaporation have systematically and substantially greater atomic density for higher thickness, higher growth temperature, and slower deposition rate, reaching the density of crystalline Si when films of thickness greater than 300 nm are grown at 425 C and at 1 Å/s. A combination of spectroscopic techniques provide insight into atomic disorder, local strains, dangling bonds, and nanovoids. Electron diffraction shows that the short-range order of the amorphous silicon is similar at all growth temperatures, but fluctuation electron microscopy shows that films grown above room temperature show a form of medium-range order not previously observed in amorphous silicon. Atomic disorder and local strain obtained from Raman spectroscopy are reduced with increasing growth temperature and show a nonmonotonic dependence on thickness. Dangling bond density decreases with increasing growth temperature and is only mildly dependent on thickness. Positron annihilation Doppler broadening spectroscopy and electron energy loss spectroscopy show that nanovoids, and not density variations within the network, are responsible for reduced atomic density. Specific heat and mechanical loss measurements, which quantify the density of tunneling two-level systems, in combination with the structural data, suggest that two-level systems in amorphous silicon films are associated with nanovoids and their surroundings, which are in essence loosely bonded regions where atoms are less constrained.- Open Access
- 23 July 2021
- Published by Springer Nature in Communications Physics
- Vol. 4 (1) , 1-10
The effect of ultrasmall grain sizes on the thermal conductivity of nanocrystalline silicon thin films
Nanocrystallization has been an important approach for reducing thermal conductivity in thermoelectric materials due to limits on phonon mean-free path imposed by the characteristic structural size. We report on thermal conductivity as low as 0.3 Wm−1K−1 of nanocrystalline silicon thin films prepared by plasma-enhanced chemical-vapor deposition as grain size is reduced to 2.8 nm by controlling hydrogen dilution of silane gas during growth. A multilayered film composed by alternating growth conditions, with layer thicknesses of 3.6 nm, is measured to have a thermal conductivity 30% and 15% lower than its two constituents. Our quantitative analysis attributes the strong reduction of thermal conductivity with decreasing grain size to the magnifying effect of porosity which occurs concomitantly due to increased mass density fluctuations. Our results demonstrate that ultrasmall grain sizes, multilayering, and porosity, all at a similar nanometer-size scale, may be a promising way to engineer thermoelectric materials.
- 23 July 2021
- Published by Springer Nature in Communications Physics
- Vol. 4 (1) , 1-10
Open AccessThe effect of ultrasmall grain sizes on the thermal conductivity of nanocrystalline silicon thin films
Nanocrystallization has been an important approach for reducing thermal conductivity in thermoelectric materials due to limits on phonon mean-free path imposed by the characteristic structural size. We report on thermal conductivity as low as 0.3 Wm−1K−1 of nanocrystalline silicon thin films prepared by plasma-enhanced chemical-vapor deposition as grain size is reduced to 2.8 nm by controlling hydrogen dilution of silane gas during growth. A multilayered film composed by alternating growth conditions, with layer thicknesses of 3.6 nm, is measured to have a thermal conductivity 30% and 15% lower than its two constituents. Our quantitative analysis attributes the strong reduction of thermal conductivity with decreasing grain size to the magnifying effect of porosity which occurs concomitantly due to increased mass density fluctuations. Our results demonstrate that ultrasmall grain sizes, multilayering, and porosity, all at a similar nanometer-size scale, may be a promising way to engineer thermoelectric materials.