Justin M. Shaw

Dynamic scattering and imaging with coherent, ultrafast, extreme-ultraviolet (EUV) light sources can resolve charge, phonon, and spin processes on their intrinsic length and time scales. However, while lensless computational imaging approaches have been highly successful in static EUV imaging, the data and computational requirements for phase reconstruction are obstacles to quickly acquiring a large series of frames to reconstruct fast time-dependent sample dynamics. In this paper, we demonstrate a noniterative, computational technique for reconstructing dynamic 1D images of the average unit cell in a time-varying periodic sample. The technique can be applied even to a preexisting time series of diffraction data without the Nyquist sampling requirement common to computational imaging and works by analyzing the changing intensities of the far field diffracted orders. Starting from a system of equations relating small changes in far field diffraction to phase and amplitude perturbations at the sample plane, it is shown that under certain conditions, changes to the $n$th diffracted order map exclusively onto the $n$th Fourier component of the perturbation via a closed-form relation. We show through rigorous coupled-wave analysis simulations that our method can provide a good approximation even outside the scalar diffraction theory framework in which it is derived. Finally, we experimentally demonstrate this reconstruction method by exciting 1D nickel nanowires on a diamond substrate using an infrared laser pump pulse and measuring their relaxation using a time-delayed EUV probe pulse to visualize nanoscale phonon dynamics.

Imaging using coherent extreme-ultraviolet (EUV) light provides exceptional capabilities for the characterization of the composition and geometry of nanostructures by probing with high spatial resolution and elemental specificity. We present a multi-modal tabletop EUV imaging reflectometer for high-fidelity metrology of nanostructures. The reflectometer is capable of measurements in three distinct modes: intensity reflectometry, scatterometry, and imaging reflectometry, where each mode addresses different nanostructure characterization challenges. We demonstrate the system’s unique ability to quantitatively and non-destructively measure the geometry and composition of nanostructures with tens of square microns field of view and sub-nanometer precision. Parameters such as surface and line edge roughness, density, nanostructure linewidth, and profile, as well as depth-resolved composition, can be quantitatively determined. The results highlight the applicability of EUV metrology to address a wide range of semiconductor and materials science challenges.

Femtosecond optical pumping of magnetic materials has been used to achieve ultrafast switching and recently to nucleate symmetry-broken magnetic states. However, when the magnetic order parameter already presents a broken-symmetry state, such as a domain pattern, the dynamics are poorly understood and consensus remains elusive. Here, we resolve the controversies in the literature by studying the ultrafast response of magnetic domain patterns with varying degrees of translation symmetry with ultrafast x-ray resonant scattering. A data analysis technique is introduced to disentangle the isotropic and anisotropic components of the x-ray scattering. We find that the scattered intensity exhibits a radial shift restricted to the isotropic component, indicating that the far-from-equilibrium magnetization dynamics are intrinsically related to the spatial features of the domain pattern. Our results suggest alternative pathways for the spatiotemporal manipulation of magnetism via far-from-equilibrium dynamics and by carefully tuning the ground-state magnetic textures.

Ultrathin Ta/CoFeB/Pt trilayer structures are relevant to a wide range of spintronic applications, from magnetic tunnel junctions to skyrmionics devices. Controlling the perpendicular magnetic anisotropy, Gilbert damping and Dzyaloshinskii-Moriya interaction in the CoFeB layer is key for these applications. We examine the role of sputter gas composition during the Pt overlayer deposition of a Ta/CoFeB/Pt trilayer in Ar, Kr and Xe working gas environments during direct current magnetron sputtering. Decreasing density of the Pt layer (from 21 g/cm ³ to 15 g/cm ³ ) was apparent in specular x-ray reflectivity measurements of the trilayer films when increasing the molecular weight of the sputtering gas from Ar to Kr to Xe. Significant effects on the Gilbert damping and the interfacial Dzyaloshinskii-Moriya interaction (DMI) energy were observed, with increases in the damping from 0.037(1) to 0.042(1) to 0.048(1), and reductions in the interfacial DMI from 0.47(4) mJ/m ² to 0.45(5) mJ/m ² to 0.39(4) mJ/m ² . The ability to control the perpendicular magnetization and DMI strength of these materials through judicious interfacial control is a means toward magnetic devices with better stability at smaller lateral dimension, key to device scaling for spintronic device arrays.

The advent of X-ray free-electron lasers (XFELs) has revolutionized fundamental science, from atomic to condensed matter physics, from chemistry to biology, giving researchers access to X-rays with unprecedented brightness, coherence and pulse duration. All XFEL facilities built until recently provided X-ray pulses at a relatively low repetition rate, with limited data statistics. Here, results from the first megahertz-repetition-rate X-ray scattering experiments at the Spectroscopy and Coherent Scattering (SCS) instrument of the European XFEL are presented. The experimental capabilities that the SCS instrument offers, resulting from the operation at megahertz repetition rates and the availability of the novel DSSC 2D imaging detector, are illustrated. Time-resolved magnetic X-ray scattering and holographic imaging experiments in solid state samples were chosen as representative, providing an ideal test-bed for operation at megahertz rates. Our results are relevant and applicable to any other non-destructive XFEL experiments in the soft X-ray range.

The interfacial Dyzaloshinskii-Moria interaction (DMI) helps to stabilize chiral domain walls and magnetic skyrmions, which will facilitate new magnetic memories and spintronics logic devices. The study of interfacial DMI in perpendicularly magnetized structurally asymmetric heavy metal (HM) / ferromagnetic (FM) multilayer systems is of high importance due to the formation of chiral magnetic textures in the presence of DMI. Here, we report the impact of the cobalt oxidation at the cobalt -aluminum oxide interface in Pt/Co/AlOx trilayer structure on the DMI by varying the post-growth annealing time and Aluminum thickness. For quantifying DMI, we employed magneto-optical imaging of asymmetric domain wall expansion, hysteresis loop shift, and spin-wave spectroscopy techniques. We further correlated the Cobalt oxidation with low-temperature Hall effect measurements and X-ray photoelectron spectroscopy. Our results emphasize the characterization of magnetic films for MRAM technologies semiconductor temperature process window, where magnetic interaction will be critical for device performance.