Francisco P. Rouxinol

This paper explores methods to enhance the reproducibility of Josephson junctions, which are crucial elements in superconducting quantum technologies, when employing the Dolan technique in 30 kV e-beam processes. The study explores the influence of dose distribution along the bridge area on reproducibility, addressing challenges related to fabrication sensitivity. Experimental methods include e-beam lithography, with electron trajectory simulations shedding light on the behavior of backscattered electrons. Wedescribe the fabrication of various Josephson junction geometries and analyze the correlation between the success rates of different lithography patterns and the simulated distribution of backscattered electrons. Our findings demonstrate a success rate of up to 96.3% for the double-resist 1-step low-energy e-beam lithography process. As a means of implementation strategy, we provide a geometric example that takes advantage of simulated stability regions to administer a controlled, uniform dose across the junction area, introducing novel features to overcome the difficulties associated with fabricating bridge-like structures.

Superconducting metamaterials are a promising resource for quantum-information science. In the context of circuit QED, they provide a means to engineer on-chip dispersion relations and a band structure that could ultimately be utilized for generating complex entangled states of quantum circuitry, for quantum-reservoir engineering, and as an element for quantum-simulation architectures. Here we report on the development and measurement at millikelvin temperatures of a particular type of circuit metamaterial resonator composed of planar superconducting lumped-element reactances in the form of a discrete left-handed transmission line that is compatible with circuit QED architectures. We discuss the details of the design, fabrication, and circuit properties of this system. As well, we provide an extensive characterization of the dense mode spectrum in these metamaterial resonators, which we conduct using both microwave-transmission measurements and laser-scanning microscopy. Results are observed to be in good quantitative agreement with numerical simulations and also an analytical model based upon current-voltage relationships for a discrete transmission line. In particular, we demonstrate that the metamaterial mode frequencies, spatial profiles of current and charge densities, and damping due to external loading can be readily modeled and understood, making this system a promising tool for future use in quantum-circuit applications and for studies of complex quantum systems.

Experiments to probe the basic quantum properties of motional degrees of freedom of mechanical systems have developed rapidly over the last decade. One promising approach is to use hybrid electromechanical systems incorporating superconducting qubits and microwave circuitry. However, a critical challenge facing the development of these systems is to achieve strong coupling between mechanics and qubits while simultaneously reducing coupling of both the qubit and mechanical mode to the environment. Here we report measurements of a qubit-coupled mechanical resonator system consisting of an ultra-high-frequency nanoresonator and a long coherence-time superconducting transmon qubit, embedded in a superconducting coplanar waveguide cavity. It is demonstrated that the nanoresonator and transmon have commensurate energies and transmon coherence times are one order of magnitude larger than for all previously reported qubit-coupled nanoresonators. Moreover, we show that numerical simulations of this new hybrid quantum system are in good agreement with spectroscopic measurements and suggest that the nanoresonator in our device resides at low thermal occupation number, near its ground state, acting as a dissipative bath seen by the qubit. We also outline how this system could soon be developed as a platform for implementing more advanced experiments with direct relevance to quantum information processing and quantum thermodynamics, including the study of nanoresonator quantum noise properties, reservoir engineering, and nanomechanical quantum state generation and detection.