Suho Ryu

In case the process margin of the device is large and the defect tendency in the wafer occurs randomly, process monitoring were possible using limited sampling measurement values. Previous 3D structure metrology equipment (CD-SEM, ellipsometry, etc.) are not able to measure the entire structure of the wafer due to the speed limit. If the measurement location does not include a weak point, an error occurs in predicting the wafer defect rate. In this study, we propose a new method that can extract weak points from color maps obtained by high-speed inspection tools that can measure the entire wafer. We were able to reduce the process error by about 20% by weak point monitoring.

Light sheet fluorescence microscopy (LSFM) has become an indispensable tool in biomedical studies owing to its depth-sectioning capability and low photo-bleaching. The axial resolution in LSFM is determined mainly by the thickness of the illumination sheet, and a high numerical-aperture lens is thus preferred in the illumination to increase the axial resolution. However, a rapid divergence of the illumination beam limits the effective field-of-view (FoV), that provides high-resolution images. Several strategies have been demonstrated for FoV enhancement, which involve the use of Bessel or Airy beams, for example. However, the generation of these beams requires complicated optical setup or phase filters with continuous phase distributions, which are difficult to manufacture. In contrast, a binary phase filter (BPF) comprising concentric rings with 0 or π phases produces a response similar to its continuous original and is easy to realize. Here, we present a novel form of LSFM that integrates BPFs derived from two representative axi-symmetric aberrations, including phase axicon and spherical aberrations, to improve the imaging performance. We demonstrate that these BPFs significantly increase the FoV, and those derived from axicon generate self-reconstructing beams, which are highly desirable in imaging through scattering specimens. We validate its high-contrast imaging capability over extended FoV by presenting three-dimensional images of microspheres, imaginal disc of Drosophila larva, and Arabidopsis.

Microneedles (MNs) have been extensively developed over the last two decades, and highly efficient drug delivery was demonstrated with their minimal invasiveness via a transdermal route. Recently, MNs have not only been applied to the skin but also to other tissues such as blood vessels, scleral tissue, and corneal tissue. In addition, the objective of the MN application has been diversified, ranging from drug delivery to wound closure and biosensing. However, since most MN fabrication methods are expensive and time-consuming, they are inappropriate to prototype MNs for various tissues that have different and complex anatomies. Although several drawing-based techniques have been introduced for rapid MN production, they fabricated MNs with limited shapes, such as thin MNs with wide bases. In this study, we propose a three-step thermal drawing for rapid, prototyping MNs that can have a variety of shapes and can be fabricated on curved surfaces. Based on the temperature control of polymer bridge formation during thermal drawing, the body profile and aspect ratios of MNs were conveniently controlled, and the effect of temperature control on the body profile of MNs was explained. Thermally drawn MNs with different shapes were fabricated both on flat and curved surfaces, and they were characterized in terms of their mechanical properties and insertion into vascular tissue to find an optimal shape for vascular tissue insertion.

We present a novel design approach for a binary phase mask with depth-of-focus (DoF) extension ability. Our method considers that the binarized version of an axisymmetric continuous phase pupil generates twin-intensity profiles that are symmetric with respect to the focal plane, each of which resembles the focal behavior of its continuous original. The DoF extension is realized by repositioning and coherently summing the twin foci to achieve an elongated focus along the axial direction. The shift of the two foci towards the focal plane can be handled by superimposing the defocus term in the continuous pupil function. We demonstrate our proposed design approach for two representative axisymmetric aberration functions, i.e., defocused phase axicon and spherical aberration. The manipulation of topological parameters in the phase axicon and spherical aberration, along with the defocus strength, enables the multiple binary phase-filter designs of DoF extension of 3.2–7.1 fold with a phase axicon and 2.8–14.8 fold with a spherical aberration, compared to the case with a clear aperture.

We present a portable multi-contrast microscope capable of producing bright-field, dark-field, and differential phase contrast images of thin biological specimens on a smartphone platform. The microscopy method is based on an imaging scheme termed “color-coded light-emitting-diode (LED) microscopy (cLEDscope),” in which a specimen is illuminated with a color-coded LED array and light transmitted through the specimen is recorded by a color image sensor. Decomposition of the image into red, green, and blue colors and subsequent computation enable multi-contrast imaging in a single shot. In order to transform a smartphone into a multi-contrast imaging device, we developed an add-on module composed of a patterned color micro-LED array, specimen stage, and miniature objective. Simple installation of this module onto a smartphone enables multi-contrast imaging of transparent specimens. In addition, an Android-based app was implemented to acquire an image, perform the associated computation, and display the multi-contrast images in real time. Herein, the details of our smartphone module and experimental demonstrations with various biological specimens are presented.