Kewen Han

High-throughput label-free measurements of the optical and mechanical properties of single microparticles play an important role in biological research, drug development, and related large population assays. However, mechanical detection techniques that rely on the density contrast of a particle with respect to its environment cannot sense neutrally bouyant particles. On the other hand, neutrally buoyant particles may still have a high compressibility contrast with respect to their environment, opening a new window to their detection and analysis. Here we present a label-free high-throughput approach for measuring the compressibility (bulk modulus) of freely flowing microparticles by means of resonant measurements in an opto-mechano-fluidic resonator.

Opto-mechano-fluidic resonators (OMFRs) are a platform for high-throughput sensing of the mechanical properties of freely flowing microparticles in arbitrary media. Experimental extraction of OMFR mode shapes, especially the acoustic pressure field within the fluidic core, is essential for determining sensitivity and for extracting the particle parameters. Here, we demonstrate an imaging technique for simultaneously capturing the spatially distributed acoustic pressure fields of multiple vibrational modes in the OMFR system. The mechanism operates using microparticles as perturbative imaging probes and potentially reveals the inverse path towards multimode inertial detection of the particles themselves.

We present a technique for mapping the acoustic pressure fields within microfluidic optomechanical resonators using a single particle probe. These mappings help improve the detection capabilities of high-throughput opto-mechano-fluidic sensors.

Enabling unique architectures and functionalities of microsystems for numerous applications in electronics, photonics and other areas often requires microassembly of separately prepared heterogeneous materials instead of monolithic microfabrication. However, microassembly of dissimilar materials while ensuring high structural integrity has been challenging in the context of deterministic transferring and joining of materials at the microscale where surface adhesion is far more dominant than body weight. Here we present an approach to assembling microsystems with microscale building blocks of four disparate classes of device-grade materials including semiconductors, metals, dielectrics and polymers. This approach uniquely utilizes reversible adhesion-based transfer printing for material transferring and thermal processing for material joining at the microscale. The interfacial joining characteristics between materials assembled by this approach are systematically investigated upon different joining mechanisms using blister tests. The device level capabilities of this approach are further demonstrated through assembling and testing of a microtoroid resonator and a radio frequency (RF) microelectromechanical systems (MEMS) switch that involve optical and electrical functionalities with mechanical motion. This work opens up a unique route towards 3D heterogeneous material integration to fabricate microsystems.

We use opto-mechanical sensing on hollow-core silica whispering gallery resonators to perform high throughput mechanical measurements on rapidly flowing single particles and cells.

The recent development of opto-mechano-fluidic resonators has provided—by harnessing photon radiation pressure—a microfluidics platform for the optical sensing of fluid density and bulk modulus. Here, we show that fluid viscosity can also be determined through optomechanical measurement of the vibrational noise spectrum of the resonator mechanical modes. A linear relationship between the spectral linewidth and root-viscosity is predicted and experimentally verified in the low viscosity regime. Our result is a step towards multi-frequency measurement of viscoelasticity of arbitrary fluids, without sample contamination, using highly sensitive optomechanics techniques.