Mehrdad Karimzadehkhouei

Silicon nanowires are among the most promising nanotechnology building blocks in innovative devices with numerous applications as nanoelectromechanical systems. Downscaling the physical size of these devices and optimization of material functionalities by engineering their structure are two promising strategies for further enhancement of their performance for integrated circuits and future-generation sensors and actuators. Integration of silicon nanowires as transduction elements for inertial sensor applications is one prominent example for an intelligent combination of such building blocks for multiple functionalities within a single sensor. Currently, the efforts in this field are marred by the lack of batch fabrication techniques compatible with semiconductor manufacturing. Development of new fabrication techniques for such one-dimensional structures will eliminate the drawbacks associated with assembly issues. The current study aims to explore the limits of batch fabrication for a single nanowire within a thick Si layer. The objective of the current work goes beyond the state of the art with significant improvements to the recent viable approach on the monolithic fabrication of nanowires, which was based on a conformal side-wall coating for the protection of the nanoscale silicon line followed by deep etch of the substrate transforming the protected layer into a silicon nanowire. The newly developed fabrication approach eliminates side wall protection and thereby reduces both process complexity and process temperature. The technique yields promising results with possible improvements for future micro and nanofabrication processes.

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven by global connectivity needs and is closely linked to emerging digital technologies and the Internet of Things. Strong technical advantages of miniaturization such as improved sensitivity, functionality, and power consumption are accompanied by significant economic benefits due to semiconductor manufacturing. Hence, the trend to produce smaller sensors and their driving force resemble very much those of the miniaturization of integrated circuits (ICs) as described by Moore's law. In this respect, with its IC‐, and MEMS‐compatibility, and scalability, the silicon nanowire is frequently employed in frontier research as the sensor building block replacing conventional sensors. The integration of the silicon nanowire with MEMS has thus generated a multiscale hybrid architecture, where the silicon nanowire serves as the piezoresistive transducer and MEMS provide an interface with external forces, such as inertial or magnetic. This approach has been reported for almost all physical sensor types over the last decade. These sensors are reviewed here with detailed classification. In each case, associated technological challenges and comparisons with conventional counterparts are provided. Future directions and opportunities are highlighted.

Due to the potential of significant energy release in cavitating flows, early cavitation inception and intensification of cavitating flows are of great importance. To use this potential, we investigated the deagglomeration of nanoparticle clusters with the implementation of hydrodynamic cavitation in a microfluidic device. For this purpose, a microfluidic device with a micro-orifice geometry was designed and fabricated using standard microfabrication processes. The system was tested with distilled water in the assembled experimental setup. The flow patterns were characterized using the cavitation number and inlet pressure. Titania nanoparticles were utilized to prepare nanoparticle suspensions. The suspensions were heated to allow agglomeration of nanoparticles. The system was operated with the new working fluid (nanoparticle clusters) at different inlet pressures. After characterizing flow patterns, the flow patterns were compared with those of pure water. The deagglomeration effects of hydrodynamic cavitation on nanoparticle clusters showed the possibility to apply this method for the stabilization of nanoparticles, which paves way to the implementation of nanoparticle suspensions to thermal fluid systems for increased energy efficiency as well as to drug delivery. Our results also indicate that the presence of nanoparticles in the working fluid enhanced cavitation intensity due to the increase in the number of heterogeneous nucleation sites.

Inertial Microfluidics offer a high throughput, label-free, easy to design, and cost-effective solutions, and are a promising technique based on hydrodynamic forces (passive techniques) instead of external ones, which can be employed in the lab-on-a-chip and micro-total-analysis-systems for the focusing, manipulation, and separation of microparticles in chemical and biomedical applications. The current study focuses on the focusing behavior of the microparticles in an asymmetric curvilinear microchannel with curvature angle of 280°. For this purpose, the focusing behavior of the microparticles with three different diameters, representing cells with different sizes in the microchannel, was experimentally studied at flow rates from 400 to 2700 µL/min. In this regard, the width and position of the focusing band are carefully recorded for all of the particles in all of the flow rates. Moreover, the distance between the binary combinations of the microparticles is reported for each flow rate, along with the Reynolds number corresponding to the largest distances. Furthermore, the results of this study are compared with those of the microchannel with the same curvature angle but having a symmetric geometry. The microchannel proposed in this study can be used or further modified for cell separation applications.

Inertial microfluidics offers high throughput, label-free, easy to design, and cost-effective solutions and is a promising technique based on hydrodynamic forces (passive techniques) instead of external ones, which can be employed in lab-on-a-chip and micro-total-analysis-systems for focusing, manipulation, and separation of microparticles in chemical and biomedical applications. The current work, studies the focusing behavior of microparticles in an asymmetric curvilinear microchannel. For this purpose, focusing behavior, including position and band width, of microparticles of diameters of 10, 15 and 20 µm, which served as representatives of different cells, in an asymmetric curvilinear microchannel with curvature angle of 280° was experimentally studied at flow rates from 400 to 2700 µL/min (corresponding to Reynolds numbers between 30 and 205). The results revealed that the largest distance between focusing bands of 20 µm and 10 µm microparticles as well as between focusing bands of 15 µm and 10 µm was obtained at Reynolds number of 121. For the case of microparticles of diameters 20 µm and 15 µm, the largest distance was seen at Reynolds number of 144. The focusing band width became smaller in the asymmetric microchannel so that focusing could be more clearly observed in this configuration.

During the last decade, second law analysis via entropy generation has become important in terms of entropy generation minimization (EGM), thermal engineering system design, irreversibility, and energy saving. In this study, heat transfer and entropy generation characteristics of flows of multi-walled carbon nanotube-based nanofluids were investigated in horizontal minitubes with outer and inner diameters of ~1067 and ~889 µm, respectively. Carbon nanotubes (CNTs) with outer diameter of 10–20 nm and length of 1–2 µm were used for nanofluid preparation, and water was considered as the base fluid. The entropy generation based on the experimental data, a significant parameter in thermal design system, was examined for CNTs/water nanofluids. The change in the entropy generation was only seen at low mass fractions (0.25 wt.% and 0.5 wt.%). Moreover, to have more insight on the entropy generation of nanofluids based on the experimental data, a further analysis was performed on Al₂O₃ and TiO₂ nanoparticles/water nanofluids from the experimental database of the previous study of the authors. The corresponding results disclosed a remarkable increase in the entropy generation rate when Al₂O₃ and TiO₂ nanoparticles were added to the base fluid.

A passive, continuous and size-dependent focusing technique enabled by “inertial microfluidics”, which takes advantage of hydrodynamic forces, is implemented in this study to focus microparticles. The objective is to analyse the decoupling effects of inertial forces and Dean drag forces on microparticles of different sizes in curvilinear microchannels with inner radius of 800 μm and curvature angle of 280°, which have not been considered in the literature related to inertial microfluidics. This fundamental approach gives insight into the underlying physics of particle dynamics and offers continuous, high-throughput, label-free and parallelizable size-based particle separation. Our design allows the same footprint to be occupied as straight channels, which makes parallelization possible with optical detection integration. This feature is also useful for ultrahigh-throughput applications such as flow cytometers with the advantages of reduced cost and size. The focusing behaviour of 20, 15 and 10 μm fluorescent polystyrene microparticles was examined for different channel Reynolds numbers. Lateral and vertical particle migrations and the equilibrium positions of these particles were investigated in detail, which may lead to the design of novel microfluidic devices with high efficiency and high throughput for particle separation, rapid detection and diagnosis of circulating tumour cells with reduced cost.