Jaroslav Hnilica

The neutral and ionized particles' density as well as their fluxes are investigated in a multi-pulse high-power impulse magnetron sputtering discharge using atomic absorption spectroscopy combined with a biasable quartz crystal microbalance. As the number of micropulses in the burst increases, a noticeable decrease in the mean discharge current is observed, leading to a reduction in both the ion density and the metal flux fractions. Extending the delay between micropulses results in an increased ionized density fraction, while the ionized metal flux fraction remains largely unchanged. Notably, the deposition rate surpasses that of a conventional direct current magnetron sputtering discharge at the same average power input, even when the ionized metal flux fraction is maintained at approximately 20%. The deposition rate enhancement becomes significant as the micropulse duration surpasses ≈ 130 µs or a burst containing more than eight micropulses is used.

There are few mistakes/typos spotted recently in the Tutorial paper “Optical spectroscopy for sputtering process characterization,” which were not corrected dur There are few mistakes/typos spotted recently in the Tutorial paper “Optical spectroscopy for sputtering process characterization,” which were not corrected dur

Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.