Zhuoyue Liang

This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer and a glass substrate, is described, the theoretical simplified model is established and the mechanical sensitivity to air flow is deducted. Then, the structure simulations based on Ansys software are implemented to preliminarily verify the feasibility of the proposed sensor conception and optimize the structure parameters simultaneously. Subsequently, a closed-loop control scheme based on digital phase-locked loop and an amplitude demodulation algorithm of oscillatory flow velocity based on the least mean square method are proposed to transform and extract the air flow signal, and then verify it by circuit simulations based on SIMULINK. Finally, the fabricated prototype is illustrated and comprehensively tested. The tested prototype possesses an x-axis scale factor of 1.56 Hz/(m/s)² and a y-axis scale factor of 1.81 Hz/(m/s)² for the steady air flow and an x-axis detection threshold of 43.27 mm/s and a y-axis detection threshold of 41.85 mm/s for the oscillatory air flow.

Inspired by the lateral line system of fish, an artificial lateral line system based on bionic hair sensor with resonant readout is presented in this paper. An artificial lateral line system, which possesses great application potential in the field of gas flow visualization, includes two different sensors: a superficial neuromast and a canal neuromast flow velocity sensor, which are used to measure the constant and oscillatory air flow velocity, respectively. The sensitive mechanism of two artificial lateral line sensors is analyzed, and a finite element simulation is implemented to verify the structural design. Then the control circuit of the artificial lateral line system is designed, employing a demodulation algorithm of oscillatory signal based on the least mean square error algorithm, which is used to calculate the oscillatory air flow velocity. Finally, the experiments are implemented to assess the performance of the two artificial lateral line systems. The experimental results show that the artificial lateral line system, which can be used to measure the constant and oscillatory air flow velocity, has a minimum threshold of 0.785 mm/s in the measurement of oscillatory air flow velocity. Moreover, the artificial canal neuromast lateral line system can filter out low-frequency disturbance and has good sensitivity for high-frequency flow velocity.