Marc Duquennoy

Sr₂TiSi₂O₈ (STS) polar glass-ceramics are promising piezoelectric materials for high-temperature surface acoustic wave (SAW) devices, provided that the orientation of the STS polar axis and the thermomechanical stability of the substrate can be controlled. In this work, the effect of the residual glass fraction on the crystallization behavior, microstructure, and thermomechanical properties of glass-ceramics synthesized from parent glasses belonging to the Sr–Ti–Si–K–Al–O system was investigated. Dilatometry, differential scanning calorimetry, and controlled heat treatments performed on the parent glasses showed that increasing the residual-glass-forming fraction slows the crystallization kinetics of STS. All investigated compositions exhibited a surface-crystallization mechanism, and the growth rate of the crystallized layer at 900 °C decreased with increasing residual glass content, thereby affecting the preferential orientation of STS crystals. The thermomechanical behavior of the resulting glass-ceramics was investigated by dilatometry and by measuring the temperature dependence of Young’s modulus using the impulse excitation technique (IET). The results were analyzed with reference to the behavior of both the residual glass and pure STS. Increasing the residual glass fraction only slightly affected the coefficient of thermal expansion (CTE) below the glass transition temperature (Tg) of the residual glass but led to a significant increase in CTE at higher temperatures. Nonlinear thermal-expansion behavior, attributed to the commensurate–incommensurate (C–I) phase transition of STS, was observed in the temperature range 100–200 °C. This phase transition also affected the evolution of Young’s modulus with temperature. Furthermore, the combined dilatometry and IET results suggest that residual stresses generated during crystallization contribute to a downward shift in the apparent commensurate–incommensurate (C–I) transition temperature of STS.

High-frequency surface acoustic wave (SAW) devices require piezoelectric thin films combining strong electromechanical coupling, high acoustic velocity, and compatibility with scalable fabrication. Lithium niobate (LiNbO₃) is a promising material, but the growth of high-quality thin films remains challenging because of lithium volatility and process-control issues. In this work, chemical beam epitaxy (CBE) was investigated as an alternative route for the deposition of c-axis-oriented LiNbO₃ thin films on C-plane sapphire at a relatively low growth temperature of 400 °C. Structural characterization confirmed high crystalline quality, with clear (006) and (0012) XRD reflections and a rocking-curve full width at half maximum of 0.04°. To evaluate acoustic performance, a SAW delay line and a one-port resonator were fabricated on 350 nm thick films using e-beam lithography. The devices operated in the 1–3 GHz range and exhibited electromechanical coupling factors of about 0.3% for the Rayleigh mode at 1.7 GHz and 3% for the Sezawa mode at 2.75 GHz. Propagation velocities ranged from 5094 to 8250 m/s, and the Rayleigh-mode resonator quality factor reached about 500. These results demonstrate the feasibility of CBE-grown LiNbO₃ films for SAW device applications.

This study presents a non-destructive method for estimating surface acoustic wave attenuation, which is highly sensitive to microstructural features, especially at high frequencies. The method uses a single wideband dispersive interdigital transducer (IDT) that remotely emits acoustic waves at the sample's edge. Chirp compression of the temporal displacement response is achieved by correlating the excitation signal with the spatial configuration of the IDT's electrodes. This technique generates high-amplitude pulses with a sufficient signal-to-noise ratio, critical for enabling accurate attenuation estimation over a frequency range (15–70 MHz). Results from nickel and aluminum demonstrate the method's effectiveness for rapid material characterization.

This paper deals with the estimation of the attenuation of surface acoustic waves (SAWs). The proposed solution consists in measuring the displacement field transversely to the axis of propagation of the acoustic beam at several distances from the transducer, considering the entire field. Unlike measurements taken along the beam axis (the usual configuration), these transverse measurements avoid any positional error with respect to this axis. Furthermore, measurements in perpendicular planes integrate the beam’s total energy, allowing divergence to be taken into account. Finally, as the measurement is carried out in the very near field (corresponding to the first tenth of the Fresnel zone), the SAW beam still has sufficient amplitude, enabling measurements to be made in a wider frequency range up to several tens of megahertz. The results of attenuation measurements on an aluminum sample at frequencies ranging from 10 to 50 MHz using the two approaches mentioned are reported, demonstrating the benefits of the proposed method in terms of measurement error.

This study focuses on the possibility of generating divergent surface acoustic waves (SAWs) with interdigital transducers (IDTs) deposited on Y128° Lithium Niobate for non-destructive testing applications, particularly in the context of manufacturing layer-on-substrate systems for microelectronic components. The selected approach is to diffuse the SAWs over a large surface area and in various directions in order to analyze the structure and detect any defects when using the well-known passive imaging by correlating the diffuse acoustic field. The introduction of SAWs is achieved using offset interdigital transducers that make acoustic contact with the sample under analysis without causing damage. The considered IDTs are characterized based on criteria for maximizing the divergence angle, maximizing SAW emission amplitude, and minimizing the acoustic contact area. Three IDT configurations were tested to compare their performance: (i) a transducer with circular electrodes emitting from its wide convex end; (ii) a circular IDT emitting from its narrow concave end; and (ii) a narrow transducer with an aperture close to two wavelengths. It was shown that the second configuration provides the highest SAW amplitude, which is important while measuring the diffuse acoustic field. Nevertheless, the third one was particularly efficient in terms of reducing the contact area.

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (FEMSDA), allow us to independently access different properties of a SAW device and fully characterize its operation using the coupling-of-modes theory (COM). A set of chemical SAW sensors coated with parylene C layers of different thicknesses (1, 1.5, and 2 µm) and an uncoated sensor were used as test samples. The sensors represent dual-channel electroacoustic delay lines operating in the vicinity of 77 MHz. The IDTs consist of split aluminum electrodes deposited on a AT-cut quartz substrate. The thickness-dependent influence of the parylene C layer was observed on the operating frequency (SAW velocity), static capacitance, attenuation, crosstalk, and reflection coefficient. COM parameters were reported for the four cases considered; measured and simulated data show good agreement. The presented approach is suitable for the design, characterization, and validation of polymer film-coated SAW sensors.

Surface acoustic waves (SAWs) are sensitive to the presence of a layer on the surface of a material, even if this layer is extremely thin compared to their wavelengths. Given the very slow propagation velocities of SAWs compared to electromagnetic waves, their wavelengths are on the order of 40 μm for acoustic frequencies on the order of 100 MHz. However, it has been shown that these waves are dispersive for coatings whose thicknesses are more than 1000 times smaller than their wavelength. This sensitivity is verified by studying the dispersion of SAWs for a frequency range between 90 and 260 MHz.

In the ultrasonic non-destructive evaluation of thin films, it is essential to have ultrasonic transducers that are able to generate surface acoustic waves (SAW) of suitably high frequencies in a wide frequency range of between ten and several hundred megahertz. If the characterization is carried out with the transducer in contact with the sample, it is also necessary that the transducers provide a high level of mechanical displacement (>100 s pm). This level allows the wave to cross the transducer–sample interface and propagate over the distance of a few millimeters on the sample and be properly detected. In this paper, an emitter transducer formed of interdigitated chirp electrodes deposited on 128° Y-cut LiNbO₃ is proposed. It is shown that this solution efficiently enables the generation of SAW (displacement level up to 1 nm) in a frequency range of between 100 and 240 MHz. The electrical characterization and a displacement field analysis of SAW by laser Doppler vibrometry are presented. The transducer’s significant unidirectionality is demonstrated. Finally, the characterization of two titanium thin films deposited on silicon is presented as an example. A meaningful SAW velocity dispersion (~10 m/s) is obtained, which allows for the precise estimation (5% of relative error) of the submicrometer thickness of the layers (20 and 50 nm).

The growth of ultrathin gold layers on a silicon substrate is performed with an unconventional ion beam assisted deposition. In this setup, evaporated gold flow and ion beam flux are perpendicular. 5 and 10 nm thick gold were deposited on tilted samples with the assistance of an argon ion beam at energies of 70 and 150 eV. We explored the evolution of surface morphology, mainly roughness and porosity, with ion bombardment for two gold thicknesses. We have also extrapolated Young’s modulus of these ultrathin layers by means of high-frequency acoustic measurements in the 90–260 MHz range. We also investigated the evolution of wettability of our structures with ion bombardment as well as their electrical and optical responses.