Toshiharu Makino
Current Organizations / Institutes
The organizations/institutes from the scholar's latest article
Research Subjects
Toshiharu Makino has a total of 255 co-authors. Here are the top co-authors by number of shared publications:
- Hiromitsu Kato
Quantum Information Research Center, Institute of Advanced Sciences, Yokohama National University, Hodogaya, Japan
92 shared publications - Masahiko Ogura
National Institute of Advanced Industrial Science and Technology
71 shared publications Satoshi Yamasaki
67 shared publications- Daisuke Takeuchi
National Institute of Advanced Industrial Science and Technology
60 shared publications Hideyo Okushi
Natl Inst Adv Ind Sci & Technol, Nanotechnol Res Inst, Tsukuba, Ibaraki 3058568, Japan
38 shared publications- Norio Tokuda
Nanomaterials Research Institute, Kanazawa University 3 , Kanazawa, Ishikawa 920-1192
28 shared publications
Latest Publications
- Open Access
- 9 November 2025
- Published by Elsevier in Applied Surface Science Advances
- Vol. 30
Formation of diamond trenches with flat {111} sidewalls via thermochemical etching by Ni films in water vapor
- 9 November 2025
- Published by Elsevier in Applied Surface Science Advances
- Vol. 30
Open AccessFormation of diamond trenches with flat {111} sidewalls via thermochemical etching by Ni films in water vapor
- Open Access
- 2 July 2025
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 135 (1) , 016902
Quantum Orbital-State Control of a Neutral Nitrogen-Vacancy Center at Millikelvin Temperatures
A neutral nitrogen-vacancy center ( NV 0 ) is promising for realizing strong coupling with a single microwave photon due to its large electric field sensitivity, although it is susceptible to environmental phonon noise at 5 K. Decreasing the temperature to 15 mK results in a tenfold increase in orbital relaxation time compared to that at 5 K. Dynamical decoupling pulses significantly increase the orbital coherence time to more than 1.6 μ s , representing a 30-fold improvement compared to that without decoupling pulses. Based on these results, a single NV 0 can reach the strong coupling regime when coupled with a high-impedance microwave resonator, thus opening up the possibility of microwave quantum electrodynamics using a single optically active defect center in diamond.
- 2 July 2025
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 135 (1) , 016902
Open AccessQuantum Orbital-State Control of a Neutral Nitrogen-Vacancy Center at Millikelvin Temperatures
A neutral nitrogen-vacancy center ( NV 0 ) is promising for realizing strong coupling with a single microwave photon due to its large electric field sensitivity, although it is susceptible to environmental phonon noise at 5 K. Decreasing the temperature to 15 mK results in a tenfold increase in orbital relaxation time compared to that at 5 K. Dynamical decoupling pulses significantly increase the orbital coherence time to more than 1.6 μ s , representing a 30-fold improvement compared to that without decoupling pulses. Based on these results, a single NV 0 can reach the strong coupling regime when coupled with a high-impedance microwave resonator, thus opening up the possibility of microwave quantum electrodynamics using a single optically active defect center in diamond.
- Open Access
- 25 February 2025
- Published by IOP Publishing in Applied Physics Express
- Vol. 18 (3)
Ampere-class double pulse testing of half-inch H-terminated diamond MOSFET chip
400 metal-oxide-semiconductor field-effect transistors (MOSFETs) were fabricated on a half-inch diamond substrate. The performance of each device was evaluated, and an H-terminated diamond MOSFET chip was created by connecting over 300 of the well performing MOSFETs in parallel, resulting in a gate width of 32 cm. This chip was used for double pulse testing, with its switching characteristics being evaluated at 2.5 A. The results show a fall/rise time of 19/32 ns, respectively, and switching losses during turn-off/turn-on of 4.65/1.24 μJ. This study demonstrated switching operation at large currents in diamond power MOSFETs.
- 25 February 2025
- Published by IOP Publishing in Applied Physics Express
- Vol. 18 (3)
Open AccessAmpere-class double pulse testing of half-inch H-terminated diamond MOSFET chip
400 metal-oxide-semiconductor field-effect transistors (MOSFETs) were fabricated on a half-inch diamond substrate. The performance of each device was evaluated, and an H-terminated diamond MOSFET chip was created by connecting over 300 of the well performing MOSFETs in parallel, resulting in a gate width of 32 cm. This chip was used for double pulse testing, with its switching characteristics being evaluated at 2.5 A. The results show a fall/rise time of 19/32 ns, respectively, and switching losses during turn-off/turn-on of 4.65/1.24 μJ. This study demonstrated switching operation at large currents in diamond power MOSFETs.
- 17 February 2025
- Published by AIP Publishing in Applied Physics Letters
- Vol. 126 (7)
Control of impurity incorporation into CVD diamond synthesized with tert-butylphosphine for quantum applications
Nitrogen-vacancy (NV) centers in phosphorus-doped diamond have potential applications in quantum technologies because their electron spin has the longest spin coherence time among those in solid systems at room temperature (RT) and because their negative charge state is more stable than that in undoped diamond. However, the conventional phosphorus source, phosphine, is toxic and explosive; a safer precursor is therefore preferred. We consequently attempted to synthesize phosphorus-doped diamonds using tert-butylphosphine (TBP), which has lower toxicity and explosivity than phosphine. However, controlling phosphorus incorporation during doping with TBP is difficult because it condenses easily and remains in the synthesis reactor due to its low boiling point. Here, we report controlling the incorporation of impurities by optimizing the synthesis conditions, such as the synthesis pressure. Comparing diamonds synthesized at 15 and 50 kPa reveals that the phosphorus concentration was reduced by 93% and the nitrogen concentration by 72% in the diamond synthesized at 50 kPa. For diamonds prepared under optimized conditions in our synthesis reactor, a long spin coherence time (T2 = 2.23 ms) for NV centers with almost perfect selective alignment of the NV axes was achieved. The T2 was comparable to the longest reported length for NV centers in a sample synthesized with phosphine, indicating that TBP is a promising phosphorus source for obtaining NV centers with excellent properties. We also achieved high electron mobility [580 cm2/(V s) at RT] in diamonds synthesized with TBP; this value is comparable to that for diamonds synthesized with phosphine.
- 17 February 2025
- Published by AIP Publishing in Applied Physics Letters
- Vol. 126 (7)
Control of impurity incorporation into CVD diamond synthesized with tert-butylphosphine for quantum applications
Nitrogen-vacancy (NV) centers in phosphorus-doped diamond have potential applications in quantum technologies because their electron spin has the longest spin coherence time among those in solid systems at room temperature (RT) and because their negative charge state is more stable than that in undoped diamond. However, the conventional phosphorus source, phosphine, is toxic and explosive; a safer precursor is therefore preferred. We consequently attempted to synthesize phosphorus-doped diamonds using tert-butylphosphine (TBP), which has lower toxicity and explosivity than phosphine. However, controlling phosphorus incorporation during doping with TBP is difficult because it condenses easily and remains in the synthesis reactor due to its low boiling point. Here, we report controlling the incorporation of impurities by optimizing the synthesis conditions, such as the synthesis pressure. Comparing diamonds synthesized at 15 and 50 kPa reveals that the phosphorus concentration was reduced by 93% and the nitrogen concentration by 72% in the diamond synthesized at 50 kPa. For diamonds prepared under optimized conditions in our synthesis reactor, a long spin coherence time (T2 = 2.23 ms) for NV centers with almost perfect selective alignment of the NV axes was achieved. The T2 was comparable to the longest reported length for NV centers in a sample synthesized with phosphine, indicating that TBP is a promising phosphorus source for obtaining NV centers with excellent properties. We also achieved high electron mobility [580 cm2/(V s) at RT] in diamonds synthesized with TBP; this value is comparable to that for diamonds synthesized with phosphine.
- Open Access
- 18 January 2025
- Published by Wiley in Advanced Quantum Technologies
- Vol. 8 (4)
Heteroepitaxial (111) Diamond Quantum Sensors with Preferentially Aligned Nitrogen‐Vacancy Centers for an Electric Vehicle Battery Monitor
A platform for heteroepitaxial (111) chemical vapor deposition (CVD) diamond quantum sensors with preferentially aligned nitrogen vacancy (NV) centers on a large substrate is developed, and its operation as an electric vehicle (EV) battery monitor is demonstrated. A self‐standing heteroepitaxial CVD diamond film with a (111) orientation and a thickness of 150 µm is grown on a non‐diamond substrate and subsequently separated from it. The high uniformity and crystallinity of the (111)‐oriented diamond is confirmed. A 150‐µm thick NV‐diamond layer is then deposited on the heteroepitaxial diamond. The T 2 value measured by confocal microscopy is 20 µs, which corresponds to substitutional nitrogen defect concentration of 8 ppm. The nitrogen‐vacancy concentration and T 2 * are estimated to be 0.05 ppm and 0.05 µs by continuous wave optically detected magnetic resonance (CW‐ODMR) spectroscopy in a fiber‐top sensor configuration. In a gradiometer, where two sensors are placed on both sides of the busbar, the noise floor is 17 nT/Hz 0.5 in the frequency range of 10–40 Hz without magnetic shielding. The Allan deviation of the magnetic field noise in the laboratory is below 0.3 µT, which corresponds to a busbar current of 10 mA, in the accumulation time range of 10 ms to 100 s.
- 18 January 2025
- Published by Wiley in Advanced Quantum Technologies
- Vol. 8 (4)
Open AccessHeteroepitaxial (111) Diamond Quantum Sensors with Preferentially Aligned Nitrogen‐Vacancy Centers for an Electric Vehicle Battery Monitor
A platform for heteroepitaxial (111) chemical vapor deposition (CVD) diamond quantum sensors with preferentially aligned nitrogen vacancy (NV) centers on a large substrate is developed, and its operation as an electric vehicle (EV) battery monitor is demonstrated. A self‐standing heteroepitaxial CVD diamond film with a (111) orientation and a thickness of 150 µm is grown on a non‐diamond substrate and subsequently separated from it. The high uniformity and crystallinity of the (111)‐oriented diamond is confirmed. A 150‐µm thick NV‐diamond layer is then deposited on the heteroepitaxial diamond. The T 2 value measured by confocal microscopy is 20 µs, which corresponds to substitutional nitrogen defect concentration of 8 ppm. The nitrogen‐vacancy concentration and T 2 * are estimated to be 0.05 ppm and 0.05 µs by continuous wave optically detected magnetic resonance (CW‐ODMR) spectroscopy in a fiber‐top sensor configuration. In a gradiometer, where two sensors are placed on both sides of the busbar, the noise floor is 17 nT/Hz 0.5 in the frequency range of 10–40 Hz without magnetic shielding. The Allan deviation of the magnetic field noise in the laboratory is below 0.3 µT, which corresponds to a busbar current of 10 mA, in the accumulation time range of 10 ms to 100 s.
- Open Access
- 1 March 2024
- Published by AIP Publishing in AIP Advances
- Vol. 14 (3)
Impact of water vapor annealing treatments on Al2O3/diamond interface
Our group developed the first inversion-type p-channel diamond metal–oxide–semiconductor field-effect transistor, which featured normally off properties by employing water vapor annealing treatments for the oxygen-terminated diamond surface. Despite the comprehensive device-grade characterization, the impact of water vapor annealing treatments on the Al2O3/diamond interface has not been investigated in detail. In this work, we fabricated four diamond metal–oxide–semiconductor (MOS) capacitors without and with water vapor annealing treatments for various times of 30 min, 1 h, and 2 h and conducted the cycle capacitance–voltage (C–V) and simultaneous C–V measurements. The large cycle C–V shift existed in the sample without water vapor annealing treatment, whereas it was significantly suppressed by water vapor annealing treatments, indicating the effective passivation of the traps with long time constants. The simultaneous C–V results showed a similar trend that the frequency dispersion of the simultaneous C–V was dramatically reduced with water vapor annealing treatments, and the interface quality of Al2O3/diamond had a slight dependence on the water vapor annealing times. Based on simultaneous C–V measurements, the interface state density (Dit) at an energy level of 0.2–0.6 eV from the valence band edge of diamond was extracted for the different MOS capacitors. The Dit was reduced by one order of magnitude with water vapor annealing treatments, and it almost did not change with the water vapor annealing times. Besides, the flat band voltage shift and effective fixed charge were also dramatically reduced by water vapor annealing. The possible physical reason for the interface improvement by water vapor annealing treatments was discussed.
- 1 March 2024
- Published by AIP Publishing in AIP Advances
- Vol. 14 (3)
Open AccessImpact of water vapor annealing treatments on Al2O3/diamond interface
Our group developed the first inversion-type p-channel diamond metal–oxide–semiconductor field-effect transistor, which featured normally off properties by employing water vapor annealing treatments for the oxygen-terminated diamond surface. Despite the comprehensive device-grade characterization, the impact of water vapor annealing treatments on the Al2O3/diamond interface has not been investigated in detail. In this work, we fabricated four diamond metal–oxide–semiconductor (MOS) capacitors without and with water vapor annealing treatments for various times of 30 min, 1 h, and 2 h and conducted the cycle capacitance–voltage (C–V) and simultaneous C–V measurements. The large cycle C–V shift existed in the sample without water vapor annealing treatment, whereas it was significantly suppressed by water vapor annealing treatments, indicating the effective passivation of the traps with long time constants. The simultaneous C–V results showed a similar trend that the frequency dispersion of the simultaneous C–V was dramatically reduced with water vapor annealing treatments, and the interface quality of Al2O3/diamond had a slight dependence on the water vapor annealing times. Based on simultaneous C–V measurements, the interface state density (Dit) at an energy level of 0.2–0.6 eV from the valence band edge of diamond was extracted for the different MOS capacitors. The Dit was reduced by one order of magnitude with water vapor annealing treatments, and it almost did not change with the water vapor annealing times. Besides, the flat band voltage shift and effective fixed charge were also dramatically reduced by water vapor annealing. The possible physical reason for the interface improvement by water vapor annealing treatments was discussed.
- Open Access
- 1 December 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 134 (21)
Low-temperature characteristics of an AlN/Diamond surface acoustic wave resonator
Phonons confined in mechanical resonators can be coupled to a variety of quantum systems and are expected to be applied to hybrid quantum systems. Diamond surface acoustic wave (SAW) devices are capable of high efficiency in phonon interaction with color centers in diamond. The temperature dependence of the quality factor is crucial for inferring the governing mechanism of coupling efficiency between phonons and color centers in diamond. In this paper, we report on the temperature dependence of the quality factor of an AlN/diamond SAW device from room temperature to 5 K. The temperature dependence of the quality factor and resonant frequency suggests that the mechanism of SAW dissipation in the AlN/diamond SAW resonator at 5 GHz is the phonon–phonon scattering in the Akheiser regime and that further cooling can be expected to improve the quality factor. This result provides a crucial guideline for the future design of AlN/diamond SAW devices.
- 1 December 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 134 (21)
Open AccessLow-temperature characteristics of an AlN/Diamond surface acoustic wave resonator
Phonons confined in mechanical resonators can be coupled to a variety of quantum systems and are expected to be applied to hybrid quantum systems. Diamond surface acoustic wave (SAW) devices are capable of high efficiency in phonon interaction with color centers in diamond. The temperature dependence of the quality factor is crucial for inferring the governing mechanism of coupling efficiency between phonons and color centers in diamond. In this paper, we report on the temperature dependence of the quality factor of an AlN/diamond SAW device from room temperature to 5 K. The temperature dependence of the quality factor and resonant frequency suggests that the mechanism of SAW dissipation in the AlN/diamond SAW resonator at 5 GHz is the phonon–phonon scattering in the Akheiser regime and that further cooling can be expected to improve the quality factor. This result provides a crucial guideline for the future design of AlN/diamond SAW devices.
- Open Access
- 5 June 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 133 (21)
Charge states of nitrogen-vacancy centers in Fermi level controlled diamond n-i-n junctions
Control of the charge state of the nitrogen-vacancy (NV) center is crucial because of its instability and its transitions between the negative (NV–) and neutral (NV0) NV charge states under laser irradiation In this study, we fabricated an n-i-n junction, with an i-layer sandwiched between two phosphorus-doped n-layers; then, we measured the charge state of NV centers under steady state and laser irradiation in a known band structure where the Fermi energy changes gradually. The steady-state charge state measured by a nondestructive single shot exhibited stable NV– and NV0 signals when the Fermi level was even slightly above and below the transition level, respectively. This result indicates that the charge state can be significantly stabilized through band engineering. Both charge-state populations were observed only when the Fermi level was close to the transition level. Under continuous green laser irradiation, the ratio of NV– measured by the photoluminescence spectra changed gradually with the Fermi level in the depletion layer because of the balance between excitation from the laser and the supply of charge from the band. This outcome agrees reasonably with the calculated bands. Furthermore, we measured the PL spectra of the ensemble NV centers and discovered that their charge state can be well-controlled, as in the single NV center. The charge state of the i-layer at the interface can be stabilized by depositing a thin n-layer on the surface. These results would contribute significantly to improve sensor performance.
- 5 June 2023
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 133 (21)
Open AccessCharge states of nitrogen-vacancy centers in Fermi level controlled diamond n-i-n junctions
Control of the charge state of the nitrogen-vacancy (NV) center is crucial because of its instability and its transitions between the negative (NV–) and neutral (NV0) NV charge states under laser irradiation In this study, we fabricated an n-i-n junction, with an i-layer sandwiched between two phosphorus-doped n-layers; then, we measured the charge state of NV centers under steady state and laser irradiation in a known band structure where the Fermi energy changes gradually. The steady-state charge state measured by a nondestructive single shot exhibited stable NV– and NV0 signals when the Fermi level was even slightly above and below the transition level, respectively. This result indicates that the charge state can be significantly stabilized through band engineering. Both charge-state populations were observed only when the Fermi level was close to the transition level. Under continuous green laser irradiation, the ratio of NV– measured by the photoluminescence spectra changed gradually with the Fermi level in the depletion layer because of the balance between excitation from the laser and the supply of charge from the band. This outcome agrees reasonably with the calculated bands. Furthermore, we measured the PL spectra of the ensemble NV centers and discovered that their charge state can be well-controlled, as in the single NV center. The charge state of the i-layer at the interface can be stabilized by depositing a thin n-layer on the surface. These results would contribute significantly to improve sensor performance.
- Open Access
- 3 April 2023
- Published by AIP Publishing in Applied Physics Letters
- Vol. 122 (14) , 141601
Charge stabilization of shallow nitrogen-vacancy centers using graphene/diamond junctions
We studied the charge-state stabilization of shallow nitrogen-vacancy (NV) centers in (111) diamond using graphene/diamond junctions. Measurement of the fluorescence stability and evaluation of the charge-state stability were conducted on the NV centers at the graphene and the graphene-free region. The results revealed that about half of the total NV centers (NV0 + NV−) at the graphene-free region were unstable, while over 90% of the measured NV centers at the graphene region were stabilized as NV− centers. Graphene/diamond junctions contribute significantly to charge-state stabilization of shallow NV− centers in (111) diamond.
- 3 April 2023
- Published by AIP Publishing in Applied Physics Letters
- Vol. 122 (14) , 141601
Open AccessCharge stabilization of shallow nitrogen-vacancy centers using graphene/diamond junctions
We studied the charge-state stabilization of shallow nitrogen-vacancy (NV) centers in (111) diamond using graphene/diamond junctions. Measurement of the fluorescence stability and evaluation of the charge-state stability were conducted on the NV centers at the graphene and the graphene-free region. The results revealed that about half of the total NV centers (NV0 + NV−) at the graphene-free region were unstable, while over 90% of the measured NV centers at the graphene region were stabilized as NV− centers. Graphene/diamond junctions contribute significantly to charge-state stabilization of shallow NV− centers in (111) diamond.
- Open Access
- 13 February 2023
- Published by AIP Publishing in Applied Physics Letters
- Vol. 122 (7) , 072101
Electroluminescence of negatively charged single NV centers in diamond
The realization of electroluminescence (EL) of negatively charged nitrogen vacancy (NV−) centers is important toward all-electrical control of diamond quantum devices. In this study, we demonstrated electrical excitation and detection of EL of single NV− centers by using lateral diamond p+–i(n−)–n+ diodes. It had been grown by homoepitaxy using the plasma enhanced chemical vapor deposition technique. We introduced a lightly phosphorus doped i(n−) layer to stabilize the negative state of NV centers. It was estimated that the efficiency of the electrical excitation rate of the NV center was more than 30 times enhanced by introducing lateral diamond p+–i(n−)–n+ diodes structure compared with the previous vertical diode. Furthermore, the EL of a single NV− center embedded in the i(n−) layer region was characterized. The results show that the charge state of the single NV centers can be manipulated by the voltage applied to the p+–i(n−)–n+ diode, where the emission of EL is increasingly dominated by NV− in the range of 30 to 50 V.
- 13 February 2023
- Published by AIP Publishing in Applied Physics Letters
- Vol. 122 (7) , 072101
Open AccessElectroluminescence of negatively charged single NV centers in diamond
The realization of electroluminescence (EL) of negatively charged nitrogen vacancy (NV−) centers is important toward all-electrical control of diamond quantum devices. In this study, we demonstrated electrical excitation and detection of EL of single NV− centers by using lateral diamond p+–i(n−)–n+ diodes. It had been grown by homoepitaxy using the plasma enhanced chemical vapor deposition technique. We introduced a lightly phosphorus doped i(n−) layer to stabilize the negative state of NV centers. It was estimated that the efficiency of the electrical excitation rate of the NV center was more than 30 times enhanced by introducing lateral diamond p+–i(n−)–n+ diodes structure compared with the previous vertical diode. Furthermore, the EL of a single NV− center embedded in the i(n−) layer region was characterized. The results show that the charge state of the single NV centers can be manipulated by the voltage applied to the p+–i(n−)–n+ diode, where the emission of EL is increasingly dominated by NV− in the range of 30 to 50 V.