Nethala Manikanthababu
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The organizations / institutes from the scholar's other articles in the past ten years
Nethala Manikanthababu has a total of 46 co-authors. Here are the top co-authors by number of shared publications:
- Rajendra Singh
Indian Institute of Technology Delhi
5 shared publications - Prajna Kunche
MMG, Indira Gandhi Centre for Atomic Research, Non-Destructive Evaluation Division, Kalpakkam, India
4 shared publications B. K. Panigrahi
Indira Gandhi Center for Atomic Research, Kalpakkam, India
3 shared publicationsInjamamul Hoque Emu
3 shared publicationsJ. V. Vas
Laboratory for In Situ and Operando Electron Nanoscopy (LISION), School of Material Science and Engineering (MSE), Nanyang Technological University, Jurong West, Singapore
3 shared publicationsK. Asokan
Aruna Asaf Ali Marg, Inter University Accelerator Centre, New Delhi, India
3 shared publications
Latest Publications
- 17 March 2026
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 73 (5) , 2540-2545
Temperature-Dependent Conduction and Dielectric Engineering of Dual-Barrier Pt/PtO x /Nb 2 O 5 /SiO 2 / β -Ga 2 O 3 MOS Capacitors
Pt/PtOx/Nb2O5 (63.5 nm)/SiO2 (6.6 nm)/$\beta $ -Ga2O3 metal–oxide–semiconductor (MOS) capacitors exhibit stable electrical operation across$25~^{\circ }$ C–$300~^{\circ }$ C to establish the dominant transport mechanism and quantify thermal stability.$I$ –$V$ measurements confirmed Poole–Frenkel (PF) emission as the prevailing mechanism, with the extracted trap barrier height ranging from 0.59 to 0.40 eV as the temperature increased, while Arrhenius analysis yielded activation energies that decreased from 0.5 to 0.42 eV as the temperature raised. The devices retain ~97% of the original accumulation capacitance obtained from$C$ –$V$ measurements and maintain reasonable border (Dbt), oxide (Dot), and interface trap (D${}_{\text {it}}\text {)}$ densities. Dbt is found to be$\sim\!\!5\times 10^{{11}}$ cm${}^{-{2}}$ at$25~^{\circ }$ C and it raised to$8.1\times 10^{{11}}$ cm${}^{-{2}}$ at$300~^{\circ }$ C. Dit is found to be$\sim\!\!5\times 10^{{11}}$ cm${}^{-{2}}$ eV${}^{-{1}}$ at$25~^{\circ }$ C and it raised to$1.2\times 10^{{12}}$ cm${}^{-{2}}$ eV${}^{-{1}}$ at$300~^{\circ }$ C. Similarly, Dot is found to be$\sim\!\!2.8\times 10^{{12}}$ cm${}^{-{2}}$ at$25~^{\circ }$ C and it raised to$\sim\!\!6.2\times 10^{{12}}$ cm${}^{-{2}}$ at$300~^{\circ }$ C. X-ray photoelectron spectroscopy (XPS) confirmed the Nb${}^{{5}+}$ oxidation state and a sharp O 1s spectra, and found oxygen-vacancy density reduction after annealed at$400~^{\circ }$ C in O2. Further, high-resolution transmission electron microscopy (TEM) revealed an abrupt and conformal Nb2O5/SiO2/$\beta $ -Ga2O3 stack without any crystallization of Nb2O5 up to$400~^{\circ }$ C.- 17 March 2026
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 73 (5) , 2540-2545
Temperature-Dependent Conduction and Dielectric Engineering of Dual-Barrier Pt/PtO x /Nb 2 O 5 /SiO 2 / β -Ga 2 O 3 MOS Capacitors
Pt/PtOx/Nb2O5 (63.5 nm)/SiO2 (6.6 nm)/$\beta $ -Ga2O3 metal–oxide–semiconductor (MOS) capacitors exhibit stable electrical operation across$25~^{\circ }$ C–$300~^{\circ }$ C to establish the dominant transport mechanism and quantify thermal stability.$I$ –$V$ measurements confirmed Poole–Frenkel (PF) emission as the prevailing mechanism, with the extracted trap barrier height ranging from 0.59 to 0.40 eV as the temperature increased, while Arrhenius analysis yielded activation energies that decreased from 0.5 to 0.42 eV as the temperature raised. The devices retain ~97% of the original accumulation capacitance obtained from$C$ –$V$ measurements and maintain reasonable border (Dbt), oxide (Dot), and interface trap (D${}_{\text {it}}\text {)}$ densities. Dbt is found to be$\sim\!\!5\times 10^{{11}}$ cm${}^{-{2}}$ at$25~^{\circ }$ C and it raised to$8.1\times 10^{{11}}$ cm${}^{-{2}}$ at$300~^{\circ }$ C. Dit is found to be$\sim\!\!5\times 10^{{11}}$ cm${}^{-{2}}$ eV${}^{-{1}}$ at$25~^{\circ }$ C and it raised to$1.2\times 10^{{12}}$ cm${}^{-{2}}$ eV${}^{-{1}}$ at$300~^{\circ }$ C. Similarly, Dot is found to be$\sim\!\!2.8\times 10^{{12}}$ cm${}^{-{2}}$ at$25~^{\circ }$ C and it raised to$\sim\!\!6.2\times 10^{{12}}$ cm${}^{-{2}}$ at$300~^{\circ }$ C. X-ray photoelectron spectroscopy (XPS) confirmed the Nb${}^{{5}+}$ oxidation state and a sharp O 1s spectra, and found oxygen-vacancy density reduction after annealed at$400~^{\circ }$ C in O2. Further, high-resolution transmission electron microscopy (TEM) revealed an abrupt and conformal Nb2O5/SiO2/$\beta $ -Ga2O3 stack without any crystallization of Nb2O5 up to$400~^{\circ }$ C.- 18 September 2025
- Published by Elsevier in Materials Research Bulletin
- Vol. 194
A comparative high-temperature electrical study of single crystal and amorphous ZnGa2O4 as a gate dielectric in β-Ga2O3 MOSCAP devices
- 18 September 2025
- Published by Elsevier in Materials Research Bulletin
- Vol. 194
A comparative high-temperature electrical study of single crystal and amorphous ZnGa2O4 as a gate dielectric in β-Ga2O3 MOSCAP devices
- 30 March 2025
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 193
Growth, optimization and high-temperature performance of GeO2/Ga2O3 MOSCAPs
- 30 March 2025
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 193
Growth, optimization and high-temperature performance of GeO2/Ga2O3 MOSCAPs
- 31 August 2024
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 16 (36) , 48488-48501
Upheaval of Negative Dielectric Permittivity and Semiconductor to Metallic Transition in a Thermally Induced Sn-Doped β-Ga2O3 (−201) Single Crystal
Thermally induced dielectric and conductivity properties of an Sn-doped β-Ga2O3 (-201) single crystal were investigated by frequency-domain impedance spectroscopy in the frequency window from 100 Hz to 1 MHz with temperatures between 293 and 873 K. The (-201) plane-orientated single crystalline nature and the presence of an Sn dopant in β-Ga2O3 were confirmed by X-ray diffraction (XRD) and X-ray photoelectron (XPS) spectroscopy. Two different trends of impedance spectra have been discussed by the modulation of relaxation times and semiconductor to metallic transition after ∼723 K due to activation of a significant number of Sn dopants and their movements with temperature. The negative impedance values were encountered in the Nyquist plots (Z' vs Z″) after 573 K and constitute a reverse movement after 723 K with temperature. The average normalized change (ΔZ'/Δf)/Z0 of impedance exhibits a broad downward relaxation plateau near 723 K, indicating a weak electrical transition. The increases in the positive value of the dielectric constant (εr') below a percolating threshold temperature 573 K is attributed to the interfacial and dipolar polarizations, and the plasma oscillation of delocalized electrons governed by the Drude theory is responsible for the negative dielectric constant above 573 K. The 3D projections of the real dielectric constant create a sharp downward sinkhole near 723 K, indicating the existence of negative dielectric permittivity. The electrical conductivity dramatically changes its trends after 523 K and confirms a transition from hopping conduction (dielectric or semiconductor) following Jonscher's power law to metallic conduction by Drude theory. Below the percolating threshold temperature, a nonoverlapping small polaron tunneling conduction mechanism was unveiled with defect-induced activation energy of 0.21 eV. The Sn-doped β-Ga2O3 exhibits unique and tailored electromagnetic responses with temperatures that can be associated with a variety of applications in electromagnetic wave manipulations, cloaking devices, antennas, sensors, medical imaging, seismic wave propagation, etc.
- 31 August 2024
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 16 (36) , 48488-48501
Upheaval of Negative Dielectric Permittivity and Semiconductor to Metallic Transition in a Thermally Induced Sn-Doped β-Ga2O3 (−201) Single Crystal
Thermally induced dielectric and conductivity properties of an Sn-doped β-Ga2O3 (-201) single crystal were investigated by frequency-domain impedance spectroscopy in the frequency window from 100 Hz to 1 MHz with temperatures between 293 and 873 K. The (-201) plane-orientated single crystalline nature and the presence of an Sn dopant in β-Ga2O3 were confirmed by X-ray diffraction (XRD) and X-ray photoelectron (XPS) spectroscopy. Two different trends of impedance spectra have been discussed by the modulation of relaxation times and semiconductor to metallic transition after ∼723 K due to activation of a significant number of Sn dopants and their movements with temperature. The negative impedance values were encountered in the Nyquist plots (Z' vs Z″) after 573 K and constitute a reverse movement after 723 K with temperature. The average normalized change (ΔZ'/Δf)/Z0 of impedance exhibits a broad downward relaxation plateau near 723 K, indicating a weak electrical transition. The increases in the positive value of the dielectric constant (εr') below a percolating threshold temperature 573 K is attributed to the interfacial and dipolar polarizations, and the plasma oscillation of delocalized electrons governed by the Drude theory is responsible for the negative dielectric constant above 573 K. The 3D projections of the real dielectric constant create a sharp downward sinkhole near 723 K, indicating the existence of negative dielectric permittivity. The electrical conductivity dramatically changes its trends after 523 K and confirms a transition from hopping conduction (dielectric or semiconductor) following Jonscher's power law to metallic conduction by Drude theory. Below the percolating threshold temperature, a nonoverlapping small polaron tunneling conduction mechanism was unveiled with defect-induced activation energy of 0.21 eV. The Sn-doped β-Ga2O3 exhibits unique and tailored electromagnetic responses with temperatures that can be associated with a variety of applications in electromagnetic wave manipulations, cloaking devices, antennas, sensors, medical imaging, seismic wave propagation, etc.
- 11 May 2023
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 70 (7) , 3711-3717
Ion Irradiation-Induced Interface Mixing and the Charge Trap Profiles Investigated by In Situ Electrical Measurements in Pt/Al2O3/ β-Ga2O3 MOSCAPs
In situ${I} - {V}$ and${C}\!\!-\!\!{V}$ measurements were performed during the 120 MeV Au$^{9+}$ ion irradiation on the Pt/Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 , metal–oxide–semiconductor capacitors (MOSCAPs), to comprehend the swift heavy ion (SHI)-induced effects at the interface and in the device performance. At a maximum fluence of$2\times 10^{{12}}$ ions/cm 2 , the${I}-\!{V}$ data showed a rise in the reverse leakage current by four orders of magnitude compared to the pristine device. The trap level (below the conduction band of Al 2 O 3) from Poole–Frenkel emission exhibits a variation from$\sim $ 1.1 to 0.91 eV. The conduction band offset${(\phi }_{B}{) }$ of Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 changes from 1.48 to 1.25 eV as estimated under the Fowler–Nordheim tunneling mechanism. In situ${C}\!\!-\!\!{V}$ measurements show a significant shift in the flat band voltages and increased oxide in the border and interface due to charge trapping. The X-ray photoelectron spectroscopy (XPS) measurements of Al 2p and O 1s core levels revealed the pre-existing oxygen defects in Al 2 O 3 , which increase with fluence. The deconvoluted peaks of Al 2p at 74.6 eV designated to Al-sub oxide and the O 1s peak variation in the FWHM signifies the increase in the O defects. Cross-sectional transmission electron microscopy (XTEM) measurements on the irradiated device (at$2\times 10^{{12}}$ ions/cm$^{{2}}{)}$ revealed a modulated interface of Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 and the formation of an interlayer of$\sim $ 4 nm Al x Ga y O z . The scanning transmission electron microscope (STEM)-based high-angle annular dark-field imaging (HAADF) energy-dispersive X-ray spectroscopy (EDS) mapping revelation and the depth profiles of XPS data confirm the formation of an Al x Ga y O z interlayer.- 11 May 2023
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 70 (7) , 3711-3717
Ion Irradiation-Induced Interface Mixing and the Charge Trap Profiles Investigated by In Situ Electrical Measurements in Pt/Al2O3/ β-Ga2O3 MOSCAPs
In situ${I} - {V}$ and${C}\!\!-\!\!{V}$ measurements were performed during the 120 MeV Au$^{9+}$ ion irradiation on the Pt/Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 , metal–oxide–semiconductor capacitors (MOSCAPs), to comprehend the swift heavy ion (SHI)-induced effects at the interface and in the device performance. At a maximum fluence of$2\times 10^{{12}}$ ions/cm 2 , the${I}-\!{V}$ data showed a rise in the reverse leakage current by four orders of magnitude compared to the pristine device. The trap level (below the conduction band of Al 2 O 3) from Poole–Frenkel emission exhibits a variation from$\sim $ 1.1 to 0.91 eV. The conduction band offset${(\phi }_{B}{) }$ of Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 changes from 1.48 to 1.25 eV as estimated under the Fowler–Nordheim tunneling mechanism. In situ${C}\!\!-\!\!{V}$ measurements show a significant shift in the flat band voltages and increased oxide in the border and interface due to charge trapping. The X-ray photoelectron spectroscopy (XPS) measurements of Al 2p and O 1s core levels revealed the pre-existing oxygen defects in Al 2 O 3 , which increase with fluence. The deconvoluted peaks of Al 2p at 74.6 eV designated to Al-sub oxide and the O 1s peak variation in the FWHM signifies the increase in the O defects. Cross-sectional transmission electron microscopy (XTEM) measurements on the irradiated device (at$2\times 10^{{12}}$ ions/cm$^{{2}}{)}$ revealed a modulated interface of Al$_{{2}}\text{O}_{{3}}/\beta $ -Ga 2 O 3 and the formation of an interlayer of$\sim $ 4 nm Al x Ga y O z . The scanning transmission electron microscope (STEM)-based high-angle annular dark-field imaging (HAADF) energy-dispersive X-ray spectroscopy (EDS) mapping revelation and the depth profiles of XPS data confirm the formation of an Al x Ga y O z interlayer.- 30 September 2022
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 69 (11) , 5996-6001
Electrical Characteristics and Defect Dynamics Induced by Swift Heavy Ion Irradiation in Pt/PtO/-Ga₂O₃ Vertical Schottky Barrier Diodes
In situ${I}$ –${V}$ and${C}$ –${V}$ measurements were performed on Pt/PtOx/$\beta $ -Ga2O3 vertical Schottky barrier diodes (SBD) during 120 MeV Au9+ swift heavy ion (SHI) irradiation in a fluence range of$1\times 10^{{10}}$ –$2\times 10^{{12}}$ ions/cm2. The reverse leakage current density increased from$1.21\times 10^{-{10}}$ to$1.69\times 10^{-{4}}$ A/cm2 at −1 V. The Schottky barrier height (SBH) remains close to ~1.8 eV up to the fluence of$5\times 10^{{11}}$ ions/cm2, and however, at the fluences of$1\times 10^{{12}}$ and$2\times 10^{{12}}$ ions/cm2, the SBH increased to 1.93 and 2.03 eV, respectively. Also, the ideality factor (IF) increased from 1.07 to 1.38. The in situ${C}$ –${V}$ measurements showed a similar trend, as the SBH decreased from 2.04 to ~1.88 eV until$5\times 10^{{11}}$ ions/cm2, but it increased to 2.14 and 2.56 eV at$1\times 10^{{12}}$ and$2\times 10^{{12}}$ ions/cm2, respectively. In addition, the doping concentration decreased from$1.01\times 10^{{16}}$ to$0.27\times 10^{{16}}$ cm$^{-{3}}$ as the defects increased significantly at the fluence of$2\times 10^{{12}}$ ions/cm2. The cathodoluminescence measurements revealed various Ga and O defects produced during SHI irradiation. Cross-sectional transmission electron microscopy measurements confirmed the formation of tracks within$\beta $ -Ga2O3 along the SHI path, and these results are explained with the inelastic thermal spike model.- 30 September 2022
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 69 (11) , 5996-6001
Electrical Characteristics and Defect Dynamics Induced by Swift Heavy Ion Irradiation in Pt/PtO/-Ga₂O₃ Vertical Schottky Barrier Diodes
In situ${I}$ –${V}$ and${C}$ –${V}$ measurements were performed on Pt/PtOx/$\beta $ -Ga2O3 vertical Schottky barrier diodes (SBD) during 120 MeV Au9+ swift heavy ion (SHI) irradiation in a fluence range of$1\times 10^{{10}}$ –$2\times 10^{{12}}$ ions/cm2. The reverse leakage current density increased from$1.21\times 10^{-{10}}$ to$1.69\times 10^{-{4}}$ A/cm2 at −1 V. The Schottky barrier height (SBH) remains close to ~1.8 eV up to the fluence of$5\times 10^{{11}}$ ions/cm2, and however, at the fluences of$1\times 10^{{12}}$ and$2\times 10^{{12}}$ ions/cm2, the SBH increased to 1.93 and 2.03 eV, respectively. Also, the ideality factor (IF) increased from 1.07 to 1.38. The in situ${C}$ –${V}$ measurements showed a similar trend, as the SBH decreased from 2.04 to ~1.88 eV until$5\times 10^{{11}}$ ions/cm2, but it increased to 2.14 and 2.56 eV at$1\times 10^{{12}}$ and$2\times 10^{{12}}$ ions/cm2, respectively. In addition, the doping concentration decreased from$1.01\times 10^{{16}}$ to$0.27\times 10^{{16}}$ cm$^{-{3}}$ as the defects increased significantly at the fluence of$2\times 10^{{12}}$ ions/cm2. The cathodoluminescence measurements revealed various Ga and O defects produced during SHI irradiation. Cross-sectional transmission electron microscopy measurements confirmed the formation of tracks within$\beta $ -Ga2O3 along the SHI path, and these results are explained with the inelastic thermal spike model.- Open Access
Review of Radiation-Induced Effects on β-Ga2O3 Materials and Devices
β-Ga2O3 has become an ultimate choice of emerging new-generation material for its wide range of compelling applications in power electronics. In this review, we have explored the available radiations in the atmosphere and the effects of radiation on the β-Ga2O3 material and devices. The focus in this review summarizes various studies covering different radiation such as swift heavy ions, protons, neutrons, electrons, Gamma, and X-rays to understand the radiation-induced effects on the structure and their reliable performance in harsh environments. In addition, we focused on the various pre-existing defects in β-Ga2O3 and the emergence of radiation-induced defects that provoke a severe concern, especially from the device performance point of view. This review presents the irradiation-induced effects on the devices such as high-power devices such as Schottky barrier diodes (SBDs), field-effect transistors (FETs), metal-oxide-semiconductor (MOS) devices, and photodetectors. Some key studies including the changes in carrier concentration with a removal rate, Schottky barrier height (SBH), ideality factor, defect dynamics dielectric damage, interface charge trapping, a thermally activated recovery mechanism for charge carriers at elevated temperature, and diffusion length of minority charge carriers. These reports show that β-Ga2O3-based devices could be deployable for space or high-radiation terrestrial applications. These results provide/suggest a better device design based on the radiation degradation studies in the state-of-the-art β-Ga2O3 devices.
Open AccessReview of Radiation-Induced Effects on β-Ga2O3 Materials and Devices
β-Ga2O3 has become an ultimate choice of emerging new-generation material for its wide range of compelling applications in power electronics. In this review, we have explored the available radiations in the atmosphere and the effects of radiation on the β-Ga2O3 material and devices. The focus in this review summarizes various studies covering different radiation such as swift heavy ions, protons, neutrons, electrons, Gamma, and X-rays to understand the radiation-induced effects on the structure and their reliable performance in harsh environments. In addition, we focused on the various pre-existing defects in β-Ga2O3 and the emergence of radiation-induced defects that provoke a severe concern, especially from the device performance point of view. This review presents the irradiation-induced effects on the devices such as high-power devices such as Schottky barrier diodes (SBDs), field-effect transistors (FETs), metal-oxide-semiconductor (MOS) devices, and photodetectors. Some key studies including the changes in carrier concentration with a removal rate, Schottky barrier height (SBH), ideality factor, defect dynamics dielectric damage, interface charge trapping, a thermally activated recovery mechanism for charge carriers at elevated temperature, and diffusion length of minority charge carriers. These reports show that β-Ga2O3-based devices could be deployable for space or high-radiation terrestrial applications. These results provide/suggest a better device design based on the radiation degradation studies in the state-of-the-art β-Ga2O3 devices.
- 5 October 2020
- Published by AIP Publishing in Applied Physics Letters
- Vol. 117 (14) , 142105
Swift heavy ion irradiation-induced modifications in the electrical and surface properties of β-Ga2O3
The electrical device characteristics of Ni/β-Ga2O3 vertical Schottky barrier diodes (SBDs) were measured in situ during the irradiation of 120 MeV Ag7+ swift heavy ions (SHIs). These devices exhibit SHI irradiation-induced degradation with 120 MeV Ag7+ ions in the ion fluence ranges of 1 × 1010 to 1 × 1012 ions/cm2. The height of the Schottky barrier is found to decrease from 1.11 to 0.93 eV, and the ideality factor increases from 1.16 to 2.06. These changes indicate the degradation of the device with SHI irradiation. A significant four orders increase is observed in the leakage current density from 4.04 × 10−8 to 1.98 × 10−4 A/cm2 at −1 V, and the series resistance also increases from 3.38 × 103 to 1.15 × 104 Ω. X-ray photoelectron spectroscopy measurements show that the Ga ions are present in divalent and trivalent states with the spectral features having the binding energies centered at 20.2 eV and 19.9 eV (Ga 3d core-levels) before and after ion irradiation. The O 2s peak shifts to 23.7 eV, and there is an increase in intensity and peak broadening due to the change in the trivalent to divalent state of Ga due to the irradiation. The O(I) peak appears at 530.7 eV in the pristine sample with the Ga–O bonding with the Ga3+ state in pure Ga2O3. Moreover, there is a significant change in the intensity and the peak width of O(II) centered at 533.0 eV after ion irradiation at the fluence of 1 × 1012 ions/cm2. This indicates that there is an increase in the surface adsorbed/lattice oxygen, resulting in GaO.
- 5 October 2020
- Published by AIP Publishing in Applied Physics Letters
- Vol. 117 (14) , 142105
Swift heavy ion irradiation-induced modifications in the electrical and surface properties of β-Ga2O3
The electrical device characteristics of Ni/β-Ga2O3 vertical Schottky barrier diodes (SBDs) were measured in situ during the irradiation of 120 MeV Ag7+ swift heavy ions (SHIs). These devices exhibit SHI irradiation-induced degradation with 120 MeV Ag7+ ions in the ion fluence ranges of 1 × 1010 to 1 × 1012 ions/cm2. The height of the Schottky barrier is found to decrease from 1.11 to 0.93 eV, and the ideality factor increases from 1.16 to 2.06. These changes indicate the degradation of the device with SHI irradiation. A significant four orders increase is observed in the leakage current density from 4.04 × 10−8 to 1.98 × 10−4 A/cm2 at −1 V, and the series resistance also increases from 3.38 × 103 to 1.15 × 104 Ω. X-ray photoelectron spectroscopy measurements show that the Ga ions are present in divalent and trivalent states with the spectral features having the binding energies centered at 20.2 eV and 19.9 eV (Ga 3d core-levels) before and after ion irradiation. The O 2s peak shifts to 23.7 eV, and there is an increase in intensity and peak broadening due to the change in the trivalent to divalent state of Ga due to the irradiation. The O(I) peak appears at 530.7 eV in the pristine sample with the Ga–O bonding with the Ga3+ state in pure Ga2O3. Moreover, there is a significant change in the intensity and the peak width of O(II) centered at 533.0 eV after ion irradiation at the fluence of 1 × 1012 ions/cm2. This indicates that there is an increase in the surface adsorbed/lattice oxygen, resulting in GaO.