Jin Wang

Compound refractive lenses (CRLs) are widely used for hard X-ray focusing at synchrotron beamlines because they provide compact, inline focusing with high transmission and are easy to install and align. They are typically fabricated from beryllium, aluminum, or diamond. Polymer lenses are a promising alternative because they are easier to fabricate, safe to handle, and compatible with flexible designs. Two-photon polymerization enables fabrication of polymer CRLs with flexible geometries and offers rapid prototyping capability. However, shrinkage during the curing process can introduce optical aberrations that limit achievable focusing performance. In this work, we develop a systematic approach for performance optimization of 3D-printed polymer CRLs through iterative geometry refinement validated by at-wavelength X-ray characterization. Using direct detector imaging, knife-edge scans, and coded-mask-based wavefront sensing, we identify substrate-constrained anisotropic shrinkage as the dominant origin of astigmatism. We show that reducing substrate contact by transitioning from square to circular apertures significantly suppresses anisotropic deformation and decreases focal-plane separation. Further optimization of the radius-of-curvature ratio along orthogonal directions enables additional correction of residual astigmatism, yielding submicron focal spot sizes (∼0.77 µm), high optical efficiency (∼75%), and gain (∼5 × 10 ³ ) at 11.3 keV. The optimized lenses demonstrate stable submicron focusing in hard X-ray fluorescence microscopy, confirming their suitability for high-performance synchrotron imaging applications.

Many nanodevices and quantum devices, with their sizes often spanning from millimeters down to sub-nanometer, have intricate low-dimensional, non-uniform, or hierarchical structures on surfaces and interfaces. Since their functionalities are dependent on these structures, high-resolution surface-sensitive characterization becomes imperative to gain a comprehensive understanding of the function–structure relationship. We thus developed hard x-ray ptychographic reflectometry imaging, a new technique that merges the high-resolution two-dimensional imaging capabilities of hard x-ray ptychography for extended objects, with the high-resolution depth profiling capabilities of x-ray reflectivity for layered structures. The synergy of these two methods fully leverages both amplitude and phase information from ptychography reconstruction to not only reveal surface topography and localized structures, such as shapes and electron densities, but also yields statistical details, such as interfacial roughness that is not readily accessible through coherent imaging solely. The hard x-ray ptychographic reflectometry imaging is well-suited for three-dimensional imaging of mesoscopic samples, particularly those comprising planar or layered nanostructures on opaque supports, and could also offer a high-resolution surface metrology and defect analysis on semiconductor devices, such as integrated nanocircuits and lithographic photomasks for microchip fabrications.

Visualizing surface-supported and buried planar mesoscale structures, such as nanoelectronics, ultrathin-film quantum dots, photovoltaics, and heterogeneous catalysts, often requires high-resolution X-ray imaging and scattering. Here, we discovered that multibeam scattering in grazing-incident reflection geometry is sensitive to three-dimensional (3D) structures in a single view, which is difficult in conventional scattering or imaging approaches. We developed a 3D finite-element-based multibeam-scattering analysis to decode the heterogeneous electric-field distribution and to faithfully reproduce the complex scattering and surface features. This approach further leads to the demonstration of hard-X-ray Lloyd’s mirror interference of scattering waves, resembling dark-field, high-contrast surface holography under the grazing-angle scattering conditions. A first-principles calculation of the single-view holographic images resolves the surface patterns’ 3D morphology with nanometer resolutions, which is critical for ultrafine nanocircuit metrology. The holographic method and simulations pave the way for single-shot structural characterization for visualizing irreversible and morphology-transforming physical and chemical processes in situ or operando.

To study nanostructures on substrates, surface-sensitive reflection-geometry scattering techniques such as grazing incident small angle X-ray scattering are commonly used to yield an averaged statistical structural information of the surface sample. Grazing incidence geometry can probe the absolute three-dimensional structural morphology of the sample if a highly coherent beam is used. Coherent surface scattering imaging (CSSI) is a powerful yet non-invasive technique similar to coherent X-ray diffractive imaging (CDI) but performed at small angles and grazing-incidence reflection geometry. A challenge with CSSI is that conventional CDI reconstruction techniques cannot be directly applied to CSSI because the Fourier-transform-based forward models cannot reproduce the dynamical scattering phenomenon near the critical angle of total external reflection of the substrate-supported samples. To overcome this challenge, we have developed a multislice forward model which can successfully simulate the dynamical or multi-beam scattering generated from surface structures and the underlying substrate. The forward model is also demonstrated to be able to reconstruct an elongated 3D pattern from a single shot scattering image in the CSSI geometry through fast-performing CUDA-assisted PyTorch optimization with automatic differentiation.

Bayesian-inference-based approaches, in particular the random-walk Markov Chain Monte Carlo (MCMC) method, have received much attention recently for X-ray scattering analysis. Hamiltonian MCMC, a state-of-the-art development in the field of MCMC, has become popular in recent years. It utilizes Hamiltonian dynamics for indirect but much more efficient drawings of the model parameters. We described the principle of the Hamiltonian MCMC for inversion problems in X-ray scattering analysis by estimating high-dimensional models for several motivating scenarios in small-angle X-ray scattering, reflectivity, and X-ray fluorescence holography. Hamiltonian MCMC with appropriate preconditioning can deliver superior performance over the random-walk MCMC, and thus can be used as an efficient tool for the statistical analysis of the parameter distributions, as well as model predictions and confidence analysis.

Microelectromechanical systems (MEMS) are miniature devices integrated into a vast range of industrial and consumer applications. Optical MEMS are developed for dynamic spatiotemporal control in lightwave manipulation and communication as modulators, switches, multiplexers, spectrometer, etc. However, they have not been shown to function similarly in sub-nm wavelength regimes, namely, with hard x-rays, as high-brilliance pulsed x-rays have proven powerful for addressing challenges in time-domain science, from energy conversion to neurobiological control. While desirable temporal properties of x-ray pulses can be enhanced by optics, conventional x-ray optics are inherently massive in size, hence, never dynamic. We demonstrate highly ultrafast x-ray optics-on-a-chip based on MEMS capable of modulating hard x-ray pulses exceeding 350 MHz, 10³× higher than any other mechanical modulator, with a pulse purity >10⁶ without compromising the spectral brilliance. Moreover, the timing characteristics of the devices can be tuned on-the-fly to deliver optimal pulse properties to create a host of dynamic x-ray instruments and applications, impossible with traditional optics of 10⁹× bulkier and more massive. The advent of the ultrafast optics-on-a-chip heralds a new paradigm of x-ray photonics, time-domain science, and accelerator diagnostics, especially at not only the future-generation light sources that offer coherent and high-frequency pulses but also lab-based facilities that normally do not offer timing structures.

Controlled synthesis of nanostructure ultrathin films is critical for applications in nanoelectronics, photonics, and energy generation and storage. The paucity of structural probes that are sensitive to nanometer-thick films and also capable of in-operando conditions with high spatiotemporal resolutions limits the understanding of morphology and dynamics in ultrathin films. Similar to X-ray fluorescence holography for crystals, where holograms are formed through the interference between the reference and the object waves, we demonstrated that an ultrathin film, being an X-ray waveguide, can also generate fluorescence holograms as a result of the establishment of X-ray standing waves. Coupled with model-independent reconstruction algorithms based on rigorous dynamical scattering theories, the thin-film-based X-ray waveguide fluorescence holography becomes a unique in situ and time-resolved imaging probe capable of elucidating the real-time nanostructure kinetics with unprecedented resolutions. Combined with chemical sensitive spectroscopic analysis, the reconstruction can yield element-specific morphology of embedding nanostructures in ultrathin films.

Time-resolved and ultrafast hard X-ray imaging, scattering and spectroscopy are powerful tools for elucidating the temporal and spatial evolution of complexity in materials. However, their temporal resolution has been limited by the storage-ring timing patterns and X-ray pulse width at synchrotron sources. Here we demonstrate that dynamic X-ray optics based on micro-electro-mechanical-system resonators can manipulate hard X-ray pulses on time scales down to 300 ps, comparable to the X-ray pulse width from typical synchrotron sources. This is achieved by timing the resonators with the storage ring to diffract X-ray pulses through the narrow Bragg peak of the single-crystalline material. Angular velocities exceeding 10⁷degrees s⁻¹are reached while maintaining the maximum linear velocity well below the sonic speed and material breakdown limit. As the time scale of the devices shortens, the devices promise to spatially disperse the temporal width of X-rays, thus generating a temporal resolution below the pulse-width limit.