Haoyu Fang

Flexible pressure sensors have been widely applied in wearable devices, e-skin, and the new generation of robots. However, most of the current sensors use connecting wires for energy supply and signal transmission, which presents an obstacle for application scenarios requiring long endurance and large movement, especially. Flexible sensors combined with wireless technology is a promising research field for realizing efficient state sensing in an active state. Here, we designed and fabricated a soft wireless passive pressure sensor, with a fully flexible Ecoflex substrate and a multi-walled carbon nanotube/polydimethylsiloxane (MWCNT/PDMS) bilayer pyramid dielectric structure. Based on the principle of the radio-frequency resonator, the device achieved pressure sensing with a changeable capacitance. Subsequently, the effect of the pyramid density was simulated by the finite element method to improve the sensitivity. With one-step embossing and spin-coating methods, the fabricated sensor had an optimized sensitivity of 14.25 MHz/kPa in the low-pressure range. The sensor exhibited the potential for application in limb bending monitoring, thus demonstrating its value for long-term wireless clinical monitoring. Moreover, the radio frequency coupling field can be affected by approaching objects, which provides a possible route for realizing non-contact sensing in applications such as pre-collision warning.

Continuous monitoring of physical motion, which can be successfully achieved via a wireless flexible wearable electronic device, is essential for people to ensure the appropriate level of exercise. Currently, most of the flexible LC pressure sensors have low sensitivity because of the high Young’s modulus of the dielectric properties (such as PDMS) and the inflexible polymer films (as the substrate of the sensors), which don’t have excellent stretchability to conform to arbitrarily curved and moving surfaces such as joints. In the LC sensing system, the metal rings, as the traditional readout device, are difficult to meet the needs of the portable readout device for the integrated and planar readout antenna. In order to improve the pressure sensitivity of the sensor, the Ecoflex microcolumn used as the dielectric of the capacitive pressure sensor was prepared by using a metal mold copying method. The Ecoflex elastomer substrates enhanced the levels of conformability, which offered improved capabilities to establish intimate contact with the curved and moving surfaces of the skin. The pressure was applied to the sensor by weights, and the resonance frequency curves of the sensor under different pressures were obtained by the readout device connected to the vector network analyzer. The experimental results show that resonant frequency decreases linearly with the increase of applied pressure in a range of 0–23,760 Pa with a high sensitivity of −2.2 MHz/KPa. We designed a coplanar waveguide-fed monopole antenna used to read the information of the LC sensor, which has the potential to be integrated with RF signal processing circuits as a portable readout device and a higher vertical readout distance (up to 4 cm) than the copper ring. The flexible LC pressure sensor can be attached to the skin conformally and is sensitive to limb bending and facial muscle movements. Therefore, it has the potential to be integrated as a body sensor network that can be used to monitor physical motion.