Bin Miao

This paper introduces a new accelerometer based on the measurement principle of atomic force microscopy. Through the structural design of micro-cantilever arrays with different stiffness coefficients, both high resolution and large dynamic range of acceleration detection can be realized theoretically. The simulation results show that the acceleration sensor can achieve 700 ng-3 g acceleration detection. The experimental results show that the operating bandwidth of the accelerometer is 570 Hz, the background noise is 700 ng/√Hz, the bias instability is 10 ng, and the acceleration dynamic detection range is ±3 g. This scheme proves the feasibility of the accelerometer based on AFM principle, and provides a new way for the development and application of large dynamic range and high-resolution accelerometers.

Due to their compact sizes, low power consumption levels, and convenient integration capabilities, piezoelectric micromachined ultrasonic transducers (PMUTs) have gained significant attention for enabling environmental sensing functionalities. However, the frequency inconsistency of the PMUT arrays often leads to directional errors with the ultrasonic beams. Herein, we propose a reconfigurable PMUT array based on a Sc_0.2Al_0.8N piezoelectric thin film for in-air ranging. Each element of the reconfigurable PMUT array possesses the ability to be independently replaced, enabling matching of the required frequency characteristics, which enhances the reusability of the device. The experimental results show that the frequency uniformity of the 2 × 2 PMUT array reaches 0.38% and the half-power beam width (θ_−3dB) of the array measured at 20 cm is 60°. At a resonance of 69.7 kHz, the sound pressure output reaches 7.4 Pa (sound pressure level of 108.2 dB) at 19 mm, with a reception sensitivity of approximately 11.6 mV/Pa. Ultimately, the maximum sensing distance of the array is 7.9 m, and it extends to 14.1 m with a horn, with a signal-to-noise ratio (SNR) of 19.5 dB. This research significantly expands the ranging capability of PMUTs and showcases their great potential in environmental perception applications.

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing applications. However, the rapid movement of miniature robots in complex environments necessitates higher ranging capabilities from sensors, making the enhancement of PMUT sensing distance critically important. In this paper, a scandium-doped aluminum nitride (ScAlN) PMUT based on a flexurally suspended membrane is proposed. Unlike the traditional fully clamped design, the PMUT incorporates a partially clamped membrane, thereby extending the vibration displacement and enhancing the output sound pressure. Experimental results demonstrate that at a resonant frequency of 78 kHz, a single PMUT generates a sound pressure level (SPL) of 112.2 dB at a distance of 10 mm and achieves a high receiving sensitivity of 12.3 mV/Pa. Distance testing reveals that a single PMUT equipped with a horn can achieve a record-breaking distance sensing range of 11.2 m when used alongside a device capable of simultaneously transmitting and receiving ultrasound signals. This achievement is significant for miniaturized and integrated applications that utilize ultrasound for long-range target detection.

In this study, we developed a low-cost, reusable, and highly sensitive analytical platform for the detection of the human metabolite uric acid (UA). This novel analysis platform combines the graphene chemoresistor detection technique with a magnetic bead (MB) system. The heterojunction (single-layer graphene and HfO₂ thin-film material) of our graphene-based biosensor worked as a transducer to detect the pH change caused by the specific catalytic reaction between UA and uricase, and hence acquires a UA concentration. Immobilization of uricase on MBs can decouple the functionalization steps from the sensor surface, which allows the sensor to be reusable. Our microsensor platform exhibits a relatively lower detection limit (1 μM), high sensitivity (5.6 mV/decade), a linear range (from 1 μM to 1000 μM), and excellent linearity (R² = 0.9945). In addition, interference assay and repeatability tests were conducted, and the result suggests that our method is highly stable and not affected by common interfering substances (glucose and urea). The integration of this high-performance and compact biosensor device can create a point-of-care diagnosis system with reduced cost, test time, and reagent volume.

This paper presents a preliminary result about ultra-deep etched microstructures on 〈1 0 0〉 silicon wafer based on metal assisted chemical etching (MaCE). Honeycomb hole arrays with 50 µ m width were successfully etched, as deep as 280 µ m. The porous defects on the patterned surface and the lateral etching on the sidewall were effectively suppressed by optimizing the etchant solution. The results in this paper indicate that 〈1 0 0〉 silicon can be etched vertically with smooth sidewalls by an etchant solution containing ethanol, instead of the conventional aqueous-based solution. This improved method of MaCE has potential application in large-scale Si etching as a supplementary method to the expensive and complicated dry etching method.