Johan Henrik Ræder

Thin-film piezoelectrics are widely investigated for actuators and energy harvesters, but there are few alternatives to toxic lead zirconate titanate. Biocompatible Ca- and Zr-modified BaTiO₃ (BCZT) is one of the most promising lead-free alternatives due to its high piezoelectric response. However, the dielectric/piezoelectric properties and structural integrity of BCZT films, which are crucial for their applications, are strongly influenced by the substrate upon which the film is grown and the related processing methods. Here, the in-plane stress, microstructure, dielectric, and piezoelectric properties of 100–500 nm thick high-temperature RF-sputtered BCZT films on industrially relevant Si-based substrates were investigated. Obtaining polycrystalline piezoelectric films required deposition temperatures ≥ 700 °C, but this induced tensile stresses of over 1500 MPa, which caused cracking in all films thicker than 200 nm. This degraded the dielectric, piezoelectric, and ferroelectric properties of films with larger electrode areas for applications. Films on SrTiO₃, on the other hand, had a compressive residual stress, with fewer defects and no cracks. The grain size and surface roughness increased with increasing deposition temperature. These findings highlight the challenges in processing BCZT films and their crucial role in advancing lead-free piezoelectric technologies for actual device applications.

Stereolithography is a layer-by-layer building fabrication technique enabling production of advanced ceramic 3D shapes that are not achievable by other methods. Critical parameters of stereolithography are associated with the preparation of a ceramic resin exhibiting suitable rheological and optical properties, as well as tunable curing property to achieve the desired level of resolution of complex 3D parts. However, tailoring the cure depth for each layer is challenging for functional ceramics due to their high refractive index giving increased light scattering. Here, the stereolithography 3D printing of BaTiO₃ ceramic resins is investigated by employing a desktop 3D printer (λ = 405 nm) and a commercial base resin. The effects of two BaTiO₃ powders with different size distributions (one micro-sized powder with grains in the range 1–20 µm, and one agglomerated nano-sized powder in the range 60–100 nm), on the viscosity and curing characteristics of the ceramic resins were investigated. It is shown that the nano-sized powder resulted in increased viscosity, increased scattering, and reduced cure depth compared to the micro-sized BaTiO₃ ceramic resin. In general, the cure depth decreased with increasing ceramic loading. Successful prints were obtained for an overcuring of at least 40% between layers to assure good adherence between the layers. The printing properties of the ceramic resins from both powders were suitable for printing green parts with 50 µm layer thickness.