SLShunyuan Lou
Shunyuan Lou
*This is an algorithmically generated author record based on publicly available information.
Current Organizations / Institutes
The organizations/institutes from the scholar's latest article
Research Subjects
Shunyuan Lou has a total of 3 co-authors. Here are the top co-authors by number of shared publications:
- Yining Chen
Zhejiang University
1 shared publication - Yu Cai
School of Microelectronics, University of Science and Technology of China, Hefei, China
1 shared publication - Yumeng Shi
School of Micro-Nano Electronics, Zhejiang University, Hangzhou, China
1 shared publication
Latest Publications
- 8 December 2023
- Published by Springer Nature in Applied Intelligence
- Vol. 54 (1) , 246-263
Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models
- 8 December 2023
- Published by Springer Nature in Applied Intelligence
- Vol. 54 (1) , 246-263
Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models